发明授权
- 专利标题: Filter having multiple piezoelectric thin-film resonators
- 专利标题(中): 具有多个压电薄膜谐振器的滤波器
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申请号: US11806129申请日: 2007-05-30
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公开(公告)号: US07545077B2公开(公告)日: 2009-06-09
- 发明人: Shinji Taniguchi , Tsuyoshi Yokoyama , Motoaki Hara , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda , Hisanori Ehara
- 申请人: Shinji Taniguchi , Tsuyoshi Yokoyama , Motoaki Hara , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda , Hisanori Ehara
- 申请人地址: JP Yokohama JP Kawasaki
- 专利权人: Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人: Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人地址: JP Yokohama JP Kawasaki
- 代理机构: Arent Fox LLP
- 优先权: JP2006-151474 20060531
- 主分类号: H03H9/00
- IPC分类号: H03H9/00 ; H01L41/08
摘要:
A filter includes multiple piezoelectric thin-film resonators each having a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode provided on the piezoelectric film so that the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators include a first resonator in which at least a part of an outer curved portion of the piezoelectric film of the first resonator is located further out than an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators includes a second resonator in which at least a part of an outer curved portion of the piezoelectric film of the second resonator substantially coincides with an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film or is further in than the outer curved portion of the region.
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