Invention Grant
US07550545B2 Fluorinated compound, and fluoropolymer, process for its production and resist composition containing it
失效
氟化合物和含氟聚合物,其制备方法和含有它的抗蚀剂组合物
- Patent Title: Fluorinated compound, and fluoropolymer, process for its production and resist composition containing it
- Patent Title (中): 氟化合物和含氟聚合物,其制备方法和含有它的抗蚀剂组合物
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Application No.: US11746316Application Date: 2007-05-09
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Publication No.: US07550545B2Publication Date: 2009-06-23
- Inventor: Yoko Takebe , Isamu Kaneko
- Applicant: Yoko Takebe , Isamu Kaneko
- Applicant Address: JP Tokyo
- Assignee: Asahi Glass Company, Limited
- Current Assignee: Asahi Glass Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- Priority: JP2003-284156 20030731; JP2004-088337 20040325
- Main IPC: C08F136/16
- IPC: C08F136/16

Abstract:
To provide a fluoropolymer having functional groups and having high transparency in a wide wavelength region, and a resist composition comprising the fluoropolymer.A fluoropolymer (A) having monomer units formed by polymerization of a fluorinated diene represented by the following formula (1): CF2═CFCH2CH-Q-CH2CH═CH2 (1) wherein Q is (CH2)aC(CF3)2OR4 (wherein a is an integer of from 0 to 3, R4 is an alkyl group or a fluorinated alkyl group having at most 20 carbon atoms which may have an etheric oxygen atom, an alkoxycarbonyl group having at most 6 carbon atoms, or CH2R5 (wherein R5 is an alkoxycarbonyl group having at most 6 carbon atoms)), or (CH2)dCOOR6 (wherein d is 0 or 1, and R6 is a hydrogen atom, or an alkyl group or a fluorinated alkyl group having at most 20 carbon atoms), a process for its production and a resist composition having the fluoropolymer (A) as a base.
Public/Granted literature
- US20070207409A1 FLUORINATED COMPOUND, AND FLUOROPOLYMER, PROCESS FOR ITS PRODUCTION AND RESIST COMPOSITION CONTAINING IT Public/Granted day:2007-09-06
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