Fluoropolymer
    3.
    发明授权
    Fluoropolymer 失效
    含氟聚合物

    公开(公告)号:US07026416B2

    公开(公告)日:2006-04-11

    申请号:US11124133

    申请日:2005-05-09

    CPC classification number: C08F214/18 C08F36/20 C08F2/60

    Abstract: To provide a fluoropolymer suitable for use as a base polymer for resist materials for excimer lasers having a wavelength of 250 nm or shorter.A fluoropolymer having a monomer unit formed by cyclopolymerization of a fluorinated diene compound represented by the following formula (3), CF2═CFCF2—C(CF3)(R5)—CH2CH═CH2  (3) wherein R5 is either a hydroxyl group blocked by —CHR7—O—R8 or an organic group having the hydroxyl group, and R8 is a cyclic saturated hydrocarbon such as a cycloalkyl group which may have a substituent, or an organic group having the cyclic saturated hydrocarbon.

    Abstract translation: 提供适合作为波长为250nm以下的准分子激光的抗蚀剂材料的基础聚合物的氟聚合物。 具有由下式(3)表示的氟化二烯化合物的环化聚合形成的单体单元的含氟聚合物,<?in-line-formula description =“In-Line Formulas”end =“lead”→> CF 2 -CFCF 2 -C(CF 3)(R 5)CH 2 CH- (3)<?in-line-formula description =“In-line Formulas”end =“tail”?>其中R 5是羟基被封闭 或具有羟基的有机基团,R 8为环状饱和烃,例如环烷基 其可以具有取代基,或具有环状饱和烃的有机基团。

    Fluorinated compound, and fluoropolymer, process for its production and resist composition containing it
    6.
    发明授权
    Fluorinated compound, and fluoropolymer, process for its production and resist composition containing it 失效
    氟化合物和含氟聚合物,其制备方法和含有它的抗蚀剂组合物

    公开(公告)号:US07550545B2

    公开(公告)日:2009-06-23

    申请号:US11746316

    申请日:2007-05-09

    Abstract: To provide a fluoropolymer having functional groups and having high transparency in a wide wavelength region, and a resist composition comprising the fluoropolymer.A fluoropolymer (A) having monomer units formed by polymerization of a fluorinated diene represented by the following formula (1): CF2═CFCH2CH-Q-CH2CH═CH2  (1) wherein Q is (CH2)aC(CF3)2OR4 (wherein a is an integer of from 0 to 3, R4 is an alkyl group or a fluorinated alkyl group having at most 20 carbon atoms which may have an etheric oxygen atom, an alkoxycarbonyl group having at most 6 carbon atoms, or CH2R5 (wherein R5 is an alkoxycarbonyl group having at most 6 carbon atoms)), or (CH2)dCOOR6 (wherein d is 0 or 1, and R6 is a hydrogen atom, or an alkyl group or a fluorinated alkyl group having at most 20 carbon atoms), a process for its production and a resist composition having the fluoropolymer (A) as a base.

    Abstract translation: 提供具有官能团并且在宽波长区域具有高透明度的含氟聚合物,以及包含含氟聚合物的抗蚀剂组合物。 具有通过由下式(1)表示的氟化二烯的聚合形成的单体单元的含氟聚合物(A):<?in-line-formula description =“In-line formula”end =“lead”>> CF2-CFCH2CH- 其中Q是(CH 2)aC(CF 3)2 OR 4(其中a是0的整数) 至3,R 4为烷基或具有至多20个碳原子的可具有醚性氧原子,最多6个碳原子的烷氧基羰基或CH 2 R 5的氟代烷基(其中R 5为至多6个的烷氧基羰基 碳原子))或(CH2)dCOOR6(其中d为0或1,R6为氢原子,或烷基或至多为20个碳原子的氟代烷基),其制备方法和抗蚀剂 具有含氟聚合物(A)作为基质的组合物。

    Fluorinated compound, fluoropolymer, resist composition, and composition for resist protective film
    7.
    发明授权
    Fluorinated compound, fluoropolymer, resist composition, and composition for resist protective film 失效
    氟化合物,含氟聚合物,抗蚀剂组合物和抗蚀剂保护膜的组合物

    公开(公告)号:US07498393B2

    公开(公告)日:2009-03-03

    申请号:US11626913

    申请日:2007-01-25

    Abstract: A fluoropolymer having functional groups and having high transparency in a wide wavelength range is provided, and a resist composition and a composition for a resist protective film, comprising the fluoropolymer, wherein the fluoropolymer has monomer units formed by cyclopolymerization of a fluorinated diene represented by the formula (1): CF2═CFCF2C(CF3)(OR1)—(CH2)nCR2═CHR3  (1) wherein R1 is a hydrogen atom, an alkyl group having at most 20 carbon atoms, or (CH2)aCOOR4 (wherein a is 0 or 1, and R4 is a hydrogen atom or an alkyl group having at most 20 carbon atoms), each of R2 and R3, which are independent of each other, is a hydrogen atom or an alkyl group having at most 12 carbon atoms, and n is 0 or 2, provided that when n is 0, at least one of R1, R2 and R3 is other than a hydrogen atom.

    Abstract translation: 提供具有官能团并且在宽波长范围内具有高透明度的含氟聚合物,以及抗蚀剂组合物和用于抗蚀剂保护膜的组合物,其包含含氟聚合物,其中所述含氟聚合物具有通过氟代二烯表示的氟化二烯的环化聚合形成的单体单元 CF2-CFCF2C(CF3)(OR1) - (CH2)nCR2-CHR3(1)<α-in-line-formula description =“In-line formula”end =“lead” line-formula description =“In-line Formulas”end =“tail”?>其中R1是氢原子,最多20个碳原子的烷基或(CH2)aCOOR4(其中a是0或1,R4 是氢原子或具有至多20个碳原子的烷基),R 2和R 3各自独立地为氢原子或至多12个碳原子的烷基,n为0或2 条件是当n为0时,R 1,R 2和R 3中的至少一个不是氢原子。

    Perfluoroalkyl substituted acrylate monomers and polymers thereof
    8.
    发明授权
    Perfluoroalkyl substituted acrylate monomers and polymers thereof 有权
    全氟烷基取代的丙烯酸酯单体及其聚合物

    公开(公告)号:US07247691B2

    公开(公告)日:2007-07-24

    申请号:US10972944

    申请日:2004-10-25

    Abstract: Fluoroalkyl amidoalkyl alcohols of the formula are disclosed and their corresponding (meth)acrylate esters. These fluoroalkyl amidoalkyl (meth)acrylate monomers can be copolymerized with a wide variety of conventional ethylenically unsaturated monomers. The resulting copolymers are useful as water, oil- and grease-proofing agents for paper, textiles and hard surfaces such as masonry and wood.

    Abstract translation: 公开了下式的氟烷基酰氨基烷基醇及其相应的(甲基)丙烯酸酯。 这些氟代烷基(甲基)丙烯酸烷基酯单体可以与各种常规的烯属不饱和单体共聚。 所得共聚物可用作纸,纺织品和硬表面如砖石和木材的水,防油和防油剂。

    Preparation of sol chloroprene polymers
    9.
    发明授权
    Preparation of sol chloroprene polymers 失效
    溶胶氯丁二烯聚合物的制备

    公开(公告)号:US3932355A

    公开(公告)日:1976-01-13

    申请号:US530035

    申请日:1974-12-05

    CPC classification number: C08F36/18

    Abstract: Addition of a polyether in which one radical is a 2-hydroxyethyl- or 2-hydroxypropyl-terminated chain of two or more oxyethylene or 2-oxypropylene units and the other radical is either a defined hydrocarbon group or the 2-hydroxyethyl group to an aqueous alkaline emulsion in which chloroprene or a mixture of chloroprene with another monomer is undergoing polymerization in the presence of an alkyl mercaptan makes it possible to carry out the polymerization to a high degree of conversion, while at the same time avoiding excessive gel formation. This invention makes possible a significant increase in polymer yield without sacrifice of polymer quality or performance.

    Abstract translation: 加入其中一个基团是两个或更多个氧乙烯或2-氧丙烯单元的2-羟基乙基或2-羟丙基封端的链,而另一个基团是定义的烃基或2-羟乙基与水相 其中氯丁二烯或氯丁二烯与另一单体的混合物在烷基硫醇存在下进行聚合的碱性乳液使得可以进行高度转化的聚合,同时避免过度的凝胶形成。 本发明可以在不牺牲聚合物质量或性能的情况下显着提高聚合物产率。

    Process for polymerizing chlorobutadienes
    10.
    发明授权
    Process for polymerizing chlorobutadienes 失效
    聚合氯化胆碱的方法

    公开(公告)号:US3904590A

    公开(公告)日:1975-09-09

    申请号:US47180974

    申请日:1974-05-20

    Applicant: DU PONT

    CPC classification number: C08F36/18 C08F2/40 C08F2/38

    Abstract: When chlorobutadienes are copolymerized with sulfur dioxide by mixing in aqueous, acidic emulsion in the presence of an acidstable surfactant, the polymerization often initiates spontaneously and proceeds in an uncontrolled manner. It has been found that the initiation and rate of polymerization can be controlled within acceptable limits when the total amount of acid-stable surfactants is between 0.3 and 4.0 parts per 100 parts of chlorobutadiene by (1) having an iron-chelating compound present in the chlorobutadiene component or in the aqueous component or in both prior to mixing them; and (2) adding incrementally or continuously quantities of an iron (II) salt as needed to initiate the polymerization and sustain it at a desired, controlled rate until the polymerization reaches a desired degree of completion.

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