发明授权
US07554349B2 Handlers for testing semiconductor devices that are capable of maintaining stable temperature in test environments
有权
用于测试能够在测试环境中保持稳定温度的半导体器件的处理程序
- 专利标题: Handlers for testing semiconductor devices that are capable of maintaining stable temperature in test environments
- 专利标题(中): 用于测试能够在测试环境中保持稳定温度的半导体器件的处理程序
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申请号: US11727938申请日: 2007-03-29
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公开(公告)号: US07554349B2公开(公告)日: 2009-06-30
- 发明人: Seong-goo Kang , Jun-ho Lee , Ki-sang Kang , Hyun-seop Shim , Do-young Kam , Jae-il Lee , Ju-il Kang
- 申请人: Seong-goo Kang , Jun-ho Lee , Ki-sang Kang , Hyun-seop Shim , Do-young Kam , Jae-il Lee , Ju-il Kang
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2006-0032743 20060411
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A semiconductor device test handler for maintaining stable temperature in a test environment may include a loading unit that loads a plurality of semiconductor devices mounted on a test tray; a soak chamber configured to receive the test tray from the loading unit and to age the semiconductor devices at an aging temperature; and a test chamber configured to receive and test the aged semiconductor devices. The test chamber may include: a test board; a first chamber; a second chamber; one or more pipelines connected to the first and second chambers that allow a temperature-control medium to flow between the first and second chambers; a de-soak chamber that further ages the tested semiconductor devices so that the tested semiconductor devices substantially return to ambient temperature; and a sorting and unloading unit that sorts the tested semiconductor devices according to results of the test and that unloads the sorted semiconductor devices.
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