发明授权
US07554349B2 Handlers for testing semiconductor devices that are capable of maintaining stable temperature in test environments 有权
用于测试能够在测试环境中保持稳定温度的半导体器件的处理程序

Handlers for testing semiconductor devices that are capable of maintaining stable temperature in test environments
摘要:
A semiconductor device test handler for maintaining stable temperature in a test environment may include a loading unit that loads a plurality of semiconductor devices mounted on a test tray; a soak chamber configured to receive the test tray from the loading unit and to age the semiconductor devices at an aging temperature; and a test chamber configured to receive and test the aged semiconductor devices. The test chamber may include: a test board; a first chamber; a second chamber; one or more pipelines connected to the first and second chambers that allow a temperature-control medium to flow between the first and second chambers; a de-soak chamber that further ages the tested semiconductor devices so that the tested semiconductor devices substantially return to ambient temperature; and a sorting and unloading unit that sorts the tested semiconductor devices according to results of the test and that unloads the sorted semiconductor devices.
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