Invention Grant
- Patent Title: Sputtering target and method/apparatus for cooling the target
- Patent Title (中): 用于冷却目标的溅射靶和方法/装置
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Application No.: US11256200Application Date: 2005-10-24
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Publication No.: US07560011B2Publication Date: 2009-07-14
- Inventor: Hendryk Richert , Uwe Kriltz , Armin Schmidt , Roland Weidl , Gerald Janicke
- Applicant: Hendryk Richert , Uwe Kriltz , Armin Schmidt , Roland Weidl , Gerald Janicke
- Applicant Address: US MI Auburn Hills
- Assignee: Guardian Industries Corp.
- Current Assignee: Guardian Industries Corp.
- Current Assignee Address: US MI Auburn Hills
- Agency: Nixon & Vanderhye, P.C.
- Main IPC: C23C14/35
- IPC: C23C14/35

Abstract:
A sputtering target includes an outer target tube, an inner support tube supporting a magnet carrier bar extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within the inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a cooling plenum radially between the inner support tube and the outer target tube; and a baffle comprising a substantially flat plate attached to the inner support tube adjacent the opposite end, the plate extending radially within the plenum between the inner support tube and the outer target tube and having an array of flow apertures therein.
Public/Granted literature
- US20070089986A1 Sputtering target and method/apparatus for cooling the target Public/Granted day:2007-04-26
Information query
IPC分类: