Invention Grant
- Patent Title: Ferroelectric thin film and device including the same
- Patent Title (中): 铁电薄膜和包括它的装置
-
Application No.: US11819425Application Date: 2007-06-27
-
Publication No.: US07560042B2Publication Date: 2009-07-14
- Inventor: Yong-kyun Lee , Young-soo Park , June-key Lee
- Applicant: Yong-kyun Lee , Young-soo Park , June-key Lee
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR2002-83184 20021224
- Main IPC: H01L41/18
- IPC: H01L41/18

Abstract:
A composition for forming a ferroelectric thin film includes: a PZT sol-gel solution including at least one of: a whole or partial hydrolysate of a lead precursor and a whole or partial hydrolyzed and polycondensated product thereof; a whole or partial hydrolysate of a zirconium precursor, a whole or partial hydrolyzed and polycondensated product thereof, and a zirconium complex having at least one hydroxy ion and at least one non-hydrolyzable ligand; and a whole or partial hydrolysate of a titanium precursor, a whole or partial hydrolyzed and polycondensated product thereof, and a titanium complex having at least one hydroxyl ion and at least one non-hydrolyzable ligand; and a Bi2SiO5 sol-gel solution including at least one of: a whole or partial hydrolysate of a silicon precursor and a whole or partial hydrolyzed and polycondensated product thereof, and a resultant obtained by refluxing triphenyl bismuth as a bismuth precursor.
Public/Granted literature
- US20080237551A1 Ferroelectric thin film and device including the same Public/Granted day:2008-10-02
Information query
IPC分类: