发明授权
- 专利标题: Transistor and method of fabricating the same
- 专利标题(中): 晶体管及其制造方法
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申请号: US11611719申请日: 2006-12-15
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公开(公告)号: US07563683B2公开(公告)日: 2009-07-21
- 发明人: Young-Chul Jang , Won-Seok Cho , Soon-Moon Jung
- 申请人: Young-Chul Jang , Won-Seok Cho , Soon-Moon Jung
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Marger Johnson & McCollom, P.C.
- 优先权: KR2003-83785 20031124
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
Disclosed is a method for fabricating a gate of a field effect transistor. The method comprises a) forming a field oxide layer on a silicon substrate and then applying a photoresist layer in order to define a gate, b) etching the silicon substrate using the photoresist layer as a mask, c) sequentially depositing a gate oxide layer and a gate polysilicon layer on an entire surface of the silicon substrate and defining the gate using the photoresist layer, d) etching the resulting silicon substrate using the photoresist layer as a mask to form the gate and forming an N− ion region by means of ion implantation, and e) depositing and etching back an oxide layer to form a sidewall oxide layer and forming an N+ ion region by means of ion implantation. Consequently, the gate is made by etching the silicon substrate. Thus, a length of the gate is reduced, so that it is possible not only to make a cell area smaller but also to prevent a short-channel effect.
公开/授权文献
- US20070087491A1 TRANSISTOR AND METHOD OF FABRICATING THE SAME 公开/授权日:2007-04-19