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US07564568B2 Phase shifting interferometry with multiple accumulation 失效
具有多次积分的相移干涉测量

Phase shifting interferometry with multiple accumulation
Abstract:
An interferometer system is disclosed which is configured to combine measurement light with reference light to form an optical interference pattern, where the interferometer system includes a modulator configured to repetitively introduce a sequence of phase shifts between the measurement and reference light; and a camera system positioned to measure the optical interference pattern, where the camera system is configured to separately accumulate time-integrated images of the optical interference pattern corresponding to the different phase shifts in the sequence during the repetitions of the sequence.
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