Invention Grant
- Patent Title: Phase shifting interferometry with multiple accumulation
- Patent Title (中): 具有多次积分的相移干涉测量
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Application No.: US11680968Application Date: 2007-03-01
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Publication No.: US07564568B2Publication Date: 2009-07-21
- Inventor: Peter De Groot , Leslie L. Deck
- Applicant: Peter De Groot , Leslie L. Deck
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
An interferometer system is disclosed which is configured to combine measurement light with reference light to form an optical interference pattern, where the interferometer system includes a modulator configured to repetitively introduce a sequence of phase shifts between the measurement and reference light; and a camera system positioned to measure the optical interference pattern, where the camera system is configured to separately accumulate time-integrated images of the optical interference pattern corresponding to the different phase shifts in the sequence during the repetitions of the sequence.
Public/Granted literature
- US20070206201A1 Phase Shifting Interferometry With Multiple Accumulation Public/Granted day:2007-09-06
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