公开(公告)号：US07796275B2

公开(公告)日：2010-09-14

申请号：US12273840

申请日：2008-11-19

申请人： Leslie L. Deck

发明人： Leslie L. Deck

IPC分类号： G01B9/02

CPC分类号： G01B9/02048 ,  G01B9/02057 ,  G01B9/02077 ,  G01B9/02079 ,  G01B9/02087 ,  G01B11/2441

摘要： A phase-shifting interferometry (PSI) method and corresponding system including: (i) recording an interferogram for each phase in a sequence of phases between test light reflected from a test surface and reference light reflected from a reference surface, the test and reference light being derived from a common source, each interferogram corresponding to an intensity pattern produced by interfering the reflected test light with the reflected reference light, the interferograms defining an interferometry signal for each of different transverse locations of a cavity defined by the test and reference surfaces, each interferometry signal including a series of intensity values corresponding to the sequence of phases, with the difference between each pair of phases in the sequence defining a corresponding phase shift increment; (ii) calculating an initial phase map for the cavity based on at least some of the recorded interferograms; (iii) calculating an estimate for each of at least some of the phase shift increments based on the initial phase map and at least some of the recorded interferograms; and (iv) calculating an improved phase map based on the calculated estimates for the phase shift increments and at least some of the recorded interferograms.

摘要翻译： 一种相移干涉测量（PSI）方法和相应的系统，包括：（i）在从测试表面反射的测试光与从参考表面反射的参考光之间的相序序列中记录每相的干涉图，测试和参考光 每个干涉图对应于通过用反射的参考光干涉反射的测试光而产生的强度图案，干涉图为由测试和参考表面限定的腔的每个不同的横向位置定义干涉测量信号， 每个干涉测量信号包括对应于相序列的一系列强度值，其中序列中的每对相位之间的差定义相应的相移增量; （ii）基于所记录的干涉图中的至少一些来计算空腔的初始相位图; （iii）基于初始相位图和至少一些记录的干涉图来计算至少一些相移增量中的每一个的估计; 以及（iv）基于所计算的相移增量的估计和至少一些记录的干涉图来计算改进的相位图。

公开(公告)号：US20100128283A1

公开(公告)日：2010-05-27

申请号：US12509083

申请日：2009-07-24

申请人： Jan Liesener ,  Mark Davidson ,  Peter J. De Groot ,  Xavier Colonna De Lega ,  Leslie L. Deck

发明人： Jan Liesener ,  Mark Davidson ,  Peter J. De Groot ,  Xavier Colonna De Lega ,  Leslie L. Deck

IPC分类号： G01B9/02 ,  G02B21/00 ,  H01S4/00

CPC分类号： G01B9/0209 ,  G01B9/02007 ,  G01B9/0201 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02068 ,  G01B9/02077 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70 ,  Y10T29/49002

摘要： In certain aspects, interferometry methods are disclosed that include providing one or more interferometry signals for a test object, wherein the interferometry signals correspond to a sequence of optical path difference (OPD) values which are not all equally spaced from one another because of noise, providing information about the unequal spacing of the sequence of OPD values, decomposing each of the interferometry signals into a contribution from a plurality of basis functions each corresponding to a different frequency and sampled at the unequally spaced OPD values, and using information about the contribution from each of the multiple basis functions to each of the interferometry signals to determine information about the test object.

摘要翻译： 在某些方面，公开了干涉测量方法，其包括为测试对象提供一个或多个干涉测量信号，其中所述干涉测量信号对应于由于噪声而不是彼此均等间隔的光程差（OPD）值序列， 提供关于OPD值序列的不等间距的信息，将每个干涉测量信号分解成来自多个基本函数的贡献，每个基本函数对应于不同的频率，并以不等间隔的OPD值进行采样，并且使用关于来自 每个干涉测量信号的多个基本函数中的每一个确定关于测试对象的信息。

公开(公告)号：US07564568B2

公开(公告)日：2009-07-21

申请号：US11680968

申请日：2007-03-01

申请人： Peter De Groot ,  Leslie L. Deck

发明人： Peter De Groot ,  Leslie L. Deck

IPC分类号： G01B11/02

CPC分类号： G01B9/02011 ,  G01B9/02002 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/02012 ,  G01B9/02057 ,  G01B2290/45 ,  G01B2290/70 ,  G01J2009/0234 ,  G01J2009/0265

摘要： An interferometer system is disclosed which is configured to combine measurement light with reference light to form an optical interference pattern, where the interferometer system includes a modulator configured to repetitively introduce a sequence of phase shifts between the measurement and reference light; and a camera system positioned to measure the optical interference pattern, where the camera system is configured to separately accumulate time-integrated images of the optical interference pattern corresponding to the different phase shifts in the sequence during the repetitions of the sequence.

摘要翻译： 公开了一种干涉仪系统，其被配置为将测量光与参考光结合以形成光学干涉图案，其中所述干涉仪系统包括被配置为在所述测量参考光和所述参考光之间重复地引入相移序列的调制器; 以及定位成测量光学干涉图案的相机系统，其中相机系统被配置为在序列的重复期间分别累积对应于序列中的不同相移的光学干涉图案的时间集成图像。

公开(公告)号：US20080266571A1

公开(公告)日：2008-10-30

申请号：US11924688

申请日：2007-10-26

申请人： Leslie L. Deck

发明人： Leslie L. Deck

IPC分类号： G01B9/02

CPC分类号： G01B9/02076 ,  G01B9/02057 ,  G01B9/02083 ,  G01B9/02084 ,  G01B2290/65 ,  G01H1/06 ,  G01H1/08

摘要： In general, in one aspect, the invention features a method including providing scanning interferometry data for a test object using phase shifting interferometry, the data including intensity values for each of multiple scan positions for different spatial locations of the test object, the intensity values for each spatial location defining an interference signal for the spatial location, the intensity values for a common scan position defining a data set for that scan position. The method also includes temporally transforming at least some of the interference signals into a first frequency domain signal, determining an estimated phase profile of the test object based on the first frequency domain signal, determining phase shifts at multiple scan positions based on the estimated phase profile, and determining a more accurate phase profile of the test object based on the estimated phase profile and the phase shifts.

摘要翻译： 通常，一方面，本发明的特征在于一种方法，包括使用相移干涉测量法为测试对象提供扫描干涉测量数据，所述数据包括针对测试对象的不同空间位置的多个扫描位置中的每一个的强度值， 每个空间位置定义用于所述空间位置的干扰信号，用于为所述扫描位置定义数据集的公共扫描位置的强度值。 该方法还包括将至少一些干扰信号变换成第一频域信号，基于第一频域信号确定测试对象的估计相位分布，基于估计的相位分布来确定多个扫描位置处的相移 并且基于估计的相位轮廓和相移来确定测试对象的更准确的相位轮廓。

公开(公告)号：US07321430B2

公开(公告)日：2008-01-22

申请号：US11112332

申请日：2005-04-22

申请人： Leslie L. Deck

发明人： Leslie L. Deck

IPC分类号： G01B11/02

CPC分类号： G01B9/02007 ,  G01B9/02003 ,  G01B9/0207 ,  G01B9/02076 ,  G01B9/02078 ,  G01B9/02083 ,  G01B9/02084 ,  G01B9/0209 ,  G01B11/2441 ,  G01B2290/70

摘要： Scanning interferometry data for a test object is provided, the data typically including intensity values for each of multiple scan positions for each of different spatial locations of the test object. The intensity values for each spatial location define an interference signal for the spatial location, and the intensity values for a common scan position define a data set for that scan position. Scan values are provided for each scan position, in which scan value increments between various scan values can be non-uniform. Information is determined about the test object based on the scanning interferometry data and scan values. The determination includes transforming at least some of the interference signals into a frequency domain with respect to the scan values.

摘要翻译： 提供了用于测试对象的扫描干涉测量数据，该数据通常包括测试对象的每个不同空间位置的多个扫描位置中的每一个的强度值。 每个空间位置的强度值定义了空间位置的干扰信号，并且共同扫描位置的强度值定义了该扫描位置的数据集。 为每个扫描位置提供扫描值，扫描值在各种扫描值之间递增可能不均匀。 基于扫描干涉测量数据和扫描值确定关于测试对象的信息。 该确定包括将至少一些干扰信号相对于扫描值转换成频域。

公开(公告)号：US07030995B2

公开(公告)日：2006-04-18

申请号：US10304426

申请日：2002-11-26

申请人： Peter J. De Groot ,  Leslie L. Deck

发明人： Peter J. De Groot ,  Leslie L. Deck

IPC分类号： G01B9/02

CPC分类号： G01B9/02084 ,  G01B9/02057 ,  G01B2290/35 ,  G01N21/19 ,  G01N21/23 ,  G01N21/45

摘要： An interferometry method including: i) forming an optical interference image by combining different portions of an optical wave front reflected from a pair of surfaces; ii) recording an interference signal at different locations of the optical interference image in response to varying the relative position of the two surfaces over a range of positions; iii) transforming the interference signal for at least one of the locations to produce a spectrum having a peak at a spectral coordinate corresponding to the variation in the relative position of the two surfaces over a range of positions; iv) identifying the spectral coordinate of the peak; and v) for each location, extracting the spectral phase of the interference signal at the coordinate of the peak. For example, the method may further include, for each of the different locations, determining a surface profile of one of the surfaces based on the spectral phase of the interference signal at each of the multiple locations.

公开(公告)号：US5784164A

公开(公告)日：1998-07-21

申请号：US822362

申请日：1997-03-20

申请人： Leslie L. Deck ,  Stephen H. Chakmakjian

发明人： Leslie L. Deck ,  Stephen H. Chakmakjian

IPC分类号： G01B9/04 ,  G01B11/00 ,  G01B11/24 ,  G01B9/02

CPC分类号： G01B11/002 ,  G01B11/2441 ,  G01B9/04

摘要： A method and improved system for automatically and substantially simultaneously focusing and orienting an interferometric optical system, such as an interferometric microscope (25) illuminated by broad-band light, with regard to a surface under test (66), for providing a best focus and orientation of objects to be measured. The optical system (20, 25, 30, 35, 37, 60, 40) includes a pixel array, such as a sparse array (30) onto which an interferogram is imaged. The pixel array (30) is scanned (20, 25) for detecting a peak fringe contrast for the pixels in the array (30) and the scan position at the detected peak fringe contrast for each pixel int he array (30) is saved (40). At least a portion, if not all, of the saved scan positions are fitted to a surface shape for providing a plane of best focus for the surface under test (66), and the surface under test (66) is automatically positioned (40, 35, 60) relative to the optical system for automatically focusing the object under test (66) across the plane of best focus.

摘要翻译： 一种方法和改进的系统，用于相对于被测试表面（66）自动和基本上同时聚焦和定向干涉式光学系统，例如由宽带光照射的干涉式显微镜（25），用于提供最佳聚焦和 要测量的物体的取向。 光学系统（20,25,30,35,37,60,40）包括像素阵列，例如在其上成像干涉图的稀疏阵列（30）。 扫描像素阵列（20,25），用于检测阵列（30）中的像素的峰值条纹对比度，并且保存阵列（30）中保存的每个像素的检测到的峰值条纹对比度的扫描位置（ 40）。 所保存的扫描位置的至少一部分（如果不是全部）被安装到表面形状，以便为被测试表面（66）提供最佳焦点的平面，并且被测试表面（66）被自动定位（40， 35,60），用于自动聚焦待测物体（66）穿过最佳焦点的平面。

公开(公告)号：US5402234A

公开(公告)日：1995-03-28

申请号：US11963

申请日：1993-02-01

申请人： Leslie L. Deck

发明人： Leslie L. Deck

IPC分类号： G01B9/02 ,  G01B9/04 ,  G01B11/02 ,  G01B11/24

CPC分类号： G01B11/026 ,  G01B9/02009 ,  G01B9/02072 ,  G01B9/02079 ,  G01B9/02083 ,  G01B9/0209 ,  G01B9/04

摘要： A method of profiling a rough surface of an object includes the steps of producing an interference pattern of the object surface using an interferometer to produce an illumination intensity on the pixels of an imaging device, varying the optical path difference between the object surface and a reference surface of the interferometer through a range including a position of zero optical path difference for each pixel, calculating values of an interference discriminator function to identify the regions of coherence, gathering at the imaging device and storing for each pixel a plurality of intensity values about the region of coherence--as identified by the state or value of the interference discriminator function calculations--at consecutive data points spaced along the range by a predetermined phase difference, storing for each pixel the relative position of the plurality of intensity values along the range, and calculating from the stored intensity values the difference in height between two selected pixels using methods known in the art. An apparatus for practicing the invention is also disclosed.

摘要翻译： 对物体的粗糙表面进行成形的方法包括以下步骤：使用干涉仪产生物体表面的干涉图案，以在成像装置的像素上产生照明强度，改变物体表面与基准面之间的光程差 干涉仪的表面通过包括每个像素的零光程差的位置的范围，计算干涉鉴别器功能的值，以识别相干区域，在成像装置处聚集并且为每个像素存储关于该像素的多个强度值 通过干扰鉴别器功能计算的状态或值识别的相干区域 - 沿着该范围间隔预定相位差的连续数据点，为每个像素存储多个强度值沿该范围的相对位置，以及 从存储的强度值计算出两者之间的高度差 使用本领域已知的方法来选择两个像素。 还公开了实施本发明的装置。

公开(公告)号：US08300233B2

公开(公告)日：2012-10-30

申请号：US13028787

申请日：2011-02-16

申请人： Leslie L. Deck ,  Peter J. De Groot ,  Michael Schroeder

发明人： Leslie L. Deck ,  Peter J. De Groot ,  Michael Schroeder

IPC分类号： G01B9/02

CPC分类号： G01D5/266 ,  G01D5/38

摘要： A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.

摘要翻译： 用于确定关于沿着编码器刻度的自由度的变化的信息的方法包括沿不同的路径引导第一波束和第二波束，并组合第一和第二波束以形成输出波束，其中第一和第二波束从 公共源，第一和第二光束具有不同的频率，其中第一光束以非Littrow角接触编码器刻度，并且第一光束从编码器刻度至少一次衍射; 基于所述输出光束检测干扰信号，所述干扰信号包括与所述第一光束和所述第二光束之间的光程差有关的外差相位; 以及基于所述外差相位确定关于所述编码器刻度的自由度的信息。

公开(公告)号：US08120781B2

公开(公告)日：2012-02-21

申请号：US12509083

申请日：2009-07-24

申请人： Jan Liesener ,  Mark Davidson ,  Peter J De Groot ,  Xavier Colonna De Lega ,  Leslie L. Deck

发明人： Jan Liesener ,  Mark Davidson ,  Peter J De Groot ,  Xavier Colonna De Lega ,  Leslie L. Deck

IPC分类号： G01B11/02

CPC分类号： G01B9/0209 ,  G01B9/02007 ,  G01B9/0201 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02068 ,  G01B9/02077 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70 ,  Y10T29/49002

摘要： In certain aspects, interferometry methods are disclosed that include providing one or more interferometry signals for a test object, wherein the interferometry signals correspond to a sequence of optical path difference (OPD) values which are not all equally spaced from one another because of noise, providing information about the unequal spacing of the sequence of OPD values, decomposing each of the interferometry signals into a contribution from a plurality of basis functions each corresponding to a different frequency and sampled at the unequally spaced OPD values, and using information about the contribution from each of the multiple basis functions to each of the interferometry signals to determine information about the test object.

摘要翻译： 在某些方面，公开了干涉测量方法，其包括为测试对象提供一个或多个干涉测量信号，其中所述干涉测量信号对应于由于噪声而不是彼此均等间隔的光程差（OPD）值序列， 提供关于OPD值序列的不等间距的信息，将每个干涉测量信号分解成来自多个基本函数的贡献，每个基本函数对应于不同的频率，并以不等间隔的OPD值进行采样，并且使用关于来自 每个干涉测量信号的多个基本函数中的每一个确定关于测试对象的信息。