发明授权
US07564621B2 Examination apparatus and focusing method of examination apparatus 有权
检查仪器和检查仪器的聚焦方法

Examination apparatus and focusing method of examination apparatus
摘要:
A focusing method for an examination apparatus that can quickly and easily perform focusing for fluoroscopy is provided. The focusing method, for an examination apparatus that can observe fluorescence emitted from a specimen, includes a first step of irradiating the specimen with light via an objective lens to generate reflected light and fluorescence; a second step of performing focusing with respect to the surface of the specimen using the reflected light from the specimen; and a third step of performing focusing for the fluorescence based on the focal position of the specimen surface in the second step.
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