Invention Grant
US07566598B2 Method of mask reduction for producing a LTPS-TFT array by use of photo-sensitive low-K dielectrics
有权
通过使用光敏低K电介质制造LTPS-TFT阵列的掩模减少方法
- Patent Title: Method of mask reduction for producing a LTPS-TFT array by use of photo-sensitive low-K dielectrics
- Patent Title (中): 通过使用光敏低K电介质制造LTPS-TFT阵列的掩模减少方法
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Application No.: US10984792Application Date: 2004-11-10
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Publication No.: US07566598B2Publication Date: 2009-07-28
- Inventor: Yung Fu Wu , Chin Chiang Chen , Chen Ming Chen
- Applicant: Yung Fu Wu , Chin Chiang Chen , Chen Ming Chen
- Applicant Address: TW Hsin-Chu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsin-Chu
- Agency: WPAT., P.C.
- Agent Justin King
- Priority: TW93124138A 20040810
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
The present invention discloses a method of mask reduction for producing a low-temperature polysilicon thin film transistor array by use of a photo-sensitive low-K dielectric, which comprises the steps of: defining a polysilicon-island on a preprocessed glass substrate; forming a gate oxide layer and a first metal layer in sequence; patterning the first metal layer to define a gate; forming a photosensitive dielectric layer; patterning the photosensitive dielectric layer and the gate oxide layer to form a plurality of contact holes, wherein said photo-sensitive low-K dielectric masks said gate oxide layer during said patterning of said gate oxide layer; forming a transmissive pixel layer and patterning the same; and forming a reflective pixel electrode layer and patterning the same.
Public/Granted literature
- US20060099746A1 Mask reduction of LPTS-TFT array by use of photo-sensitive low-K dielectrics Public/Granted day:2006-05-11
Information query
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