Invention Grant
US07566598B2 Method of mask reduction for producing a LTPS-TFT array by use of photo-sensitive low-K dielectrics 有权
通过使用光敏低K电介质制造LTPS-TFT阵列的掩模减少方法

Method of mask reduction for producing a LTPS-TFT array by use of photo-sensitive low-K dielectrics
Abstract:
The present invention discloses a method of mask reduction for producing a low-temperature polysilicon thin film transistor array by use of a photo-sensitive low-K dielectric, which comprises the steps of: defining a polysilicon-island on a preprocessed glass substrate; forming a gate oxide layer and a first metal layer in sequence; patterning the first metal layer to define a gate; forming a photosensitive dielectric layer; patterning the photosensitive dielectric layer and the gate oxide layer to form a plurality of contact holes, wherein said photo-sensitive low-K dielectric masks said gate oxide layer during said patterning of said gate oxide layer; forming a transmissive pixel layer and patterning the same; and forming a reflective pixel electrode layer and patterning the same.
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