Invention Grant
- Patent Title: Fabrication of silicon micro-mechanical structures
- Patent Title (中): 硅微机械结构的制造
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Application No.: US11149921Application Date: 2005-06-10
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Publication No.: US07566939B2Publication Date: 2009-07-28
- Inventor: Michel Despont , Roy H. Magnuson , Ute Drechsler
- Applicant: Michel Despont , Roy H. Magnuson , Ute Drechsler
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Priority: EP01810046 20010118
- Main IPC: H01L29/82
- IPC: H01L29/82
Abstract:
A method for protecting a material of a microstructure comprising the material and a noble metal layer against undesired galvanic etching during manufacture, the method comprises forming on the structure a sacrificial metal layer having a lower redox potential than the material, the sacrificial metal layer being electrically connected to the noble metal layer.
Public/Granted literature
- US20050230839A1 Fabrication of silicon micro-mechanical structures Public/Granted day:2005-10-20
Information query
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