发明授权
US07569869B2 Transistor having tensile strained channel and system including same
有权
具有拉伸应变通道的晶体管和包括其的系统
- 专利标题: Transistor having tensile strained channel and system including same
- 专利标题(中): 具有拉伸应变通道的晶体管和包括其的系统
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申请号: US11729564申请日: 2007-03-29
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公开(公告)号: US07569869B2公开(公告)日: 2009-08-04
- 发明人: Been-Yih Jin , Robert S. Chau , Suman Datta , Jack T. Kavalieros , Marko Radosavlievic
- 申请人: Been-Yih Jin , Robert S. Chau , Suman Datta , Jack T. Kavalieros , Marko Radosavlievic
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Intel Corporation
- 代理商 Scott M. Lane
- 主分类号: H01L29/737
- IPC分类号: H01L29/737 ; H01L29/778
摘要:
A transistor structure and a system including the transistor structure. The transistor structure comprises: a substrate including a first layer comprising a first crystalline material; a tensile strained channel formed on a surface of the first layer and comprising a second crystalline material having a lattice spacing that is smaller than a lattice spacing of the first crystalline material; a metal gate on the substrate; a pair of sidewall spacers on opposite sides of the metal gate; and a source region and a drain region on opposite sides of the metal gate adjacent a corresponding one of the sidewall spacers.
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