发明授权
- 专利标题: Film taking-off method
- 专利标题(中): 电影起飞方式
-
申请号: US11221045申请日: 2005-09-06
-
公开(公告)号: US07572714B2公开(公告)日: 2009-08-11
- 发明人: Cécile Aulnette , Ian Cayrefourcq , Carlos Mazure
- 申请人: Cécile Aulnette , Ian Cayrefourcq , Carlos Mazure
- 申请人地址: FR Bernin
- 专利权人: S.O.I.Tec Silicon on Insulator Technologies
- 当前专利权人: S.O.I.Tec Silicon on Insulator Technologies
- 当前专利权人地址: FR Bernin
- 代理机构: Winston & Strawn LLP
- 优先权: FR0507300 20050708
- 主分类号: H01L21/30
- IPC分类号: H01L21/30
摘要:
The invention relates to a method of producing a film intended for applications in electronics, optics or optronics starting from an initial wafer, which includes a step of implanting atomic species through one of the faces of the wafer. This method includes forming a step of defined height around the periphery of the wafer, with the step having a mean thickness that is less than that of the wafer; and selectively implanting atomic species through a face of the wafer but not through the step to form an implanted zone at a defined implant depth with the film being defined between the face of the wafer and the implanted zone. The implantation of atomic species into the step can be prevented by forming a protective layer at least over the step or by masking the step. The invention also relates to a wafer obtainable by the method.
公开/授权文献
- US20070023867A1 Film taking-off method 公开/授权日:2007-02-01
信息查询
IPC分类: