Invention Grant
- Patent Title: Methods for optimizing thin film formation with reactive gases
- Patent Title (中): 用反应气体优化薄膜形成的方法
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Application No.: US12060528Application Date: 2008-04-01
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Publication No.: US07572740B2Publication Date: 2009-08-11
- Inventor: Mason Terry , Malcolm Abbott , Maxim Kelman , Andreas Meisel , Dmitry Poplavskyy , Eric Schiff
- Applicant: Mason Terry , Malcolm Abbott , Maxim Kelman , Andreas Meisel , Dmitry Poplavskyy , Eric Schiff
- Applicant Address: US CA Sunnyvale
- Assignee: Innovalight, Inc.
- Current Assignee: Innovalight, Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: Foley & Lardner LLP
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01L21/461

Abstract:
A method for producing a Group IV semiconductor thin film in a chamber is disclosed. The method includes positioning a substrate in the chamber, wherein the chamber further has a chamber pressure. The method further includes depositing a nanoparticle ink on the substrate, the nanoparticle ink including set of Group IV semiconductor nanoparticles and a solvent, wherein each nanoparticle of the set of Group IV semiconductor nanoparticles includes a nanoparticle surface, wherein a layer of Group IV semiconductor nanoparticles is formed. The method also includes striking a hydrogen plasma; and heating the layer of Group IV semiconductor nanoparticles to a fabrication temperature of between about 300° C. and about 1350° C., and between about 1 nanosecond and about 10 minutes; wherein the Group IV semiconductor thin film is formed.
Public/Granted literature
- US20080254601A1 METHODS FOR OPTIMIZING THIN FILM FORMATION WITH REACTIVE GASES Public/Granted day:2008-10-16
Information query
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