发明授权
- 专利标题: Micro-electromechanical system Fabry-Perot filter mirrors
- 专利标题(中): 微机电系统法布里 - 珀罗滤镜
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申请号: US11502189申请日: 2006-08-10
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公开(公告)号: US07573578B2公开(公告)日: 2009-08-11
- 发明人: Anis Zribi , Glenn S. Claydon , David C. Hays , Stacey Kennerly , Long Que , Shankar Chandrasekaran , Shivappa Goravar , Ayan Banerjee
- 申请人: Anis Zribi , Glenn S. Claydon , David C. Hays , Stacey Kennerly , Long Que , Shankar Chandrasekaran , Shivappa Goravar , Ayan Banerjee
- 申请人地址: US CA Newark
- 专利权人: GE Homeland Protection, Inc.
- 当前专利权人: GE Homeland Protection, Inc.
- 当前专利权人地址: US CA Newark
- 代理商 Joseph J. Christian
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
According to one embodiment, a micro-electrical mechanical system apparatus includes first and second mirrors that define a cavity. Moreover, a photonic band-gap structure coats a surface of at least one of the first or second mirrors to improve reflectivity. Another embodiment includes a third mirror, wherein the second and third mirrors form a second cavity. The spaces between the mirrors might comprise, for example, a pair of Fabry-Perot filter cavities for a spectrometer.
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