发明授权
- 专利标题: Disposable organic spacers
- 专利标题(中): 一次性有机垫片
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申请号: US11825953申请日: 2007-07-10
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公开(公告)号: US07579228B2公开(公告)日: 2009-08-25
- 发明人: Paul A. Grudowski , Kurt H. Junker , Thomas J. Kropewnicki , Andrew G. Nagy
- 申请人: Paul A. Grudowski , Kurt H. Junker , Thomas J. Kropewnicki , Andrew G. Nagy
- 申请人地址: US TX Austin
- 专利权人: Freescale Semiconductor, Inc.
- 当前专利权人: Freescale Semiconductor, Inc.
- 当前专利权人地址: US TX Austin
- 代理机构: Fortkort & Houston P.C.
- 代理商 John A. Fortkor
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238
摘要:
A method for making a semiconductor device is provided, comprising (a) providing a semiconductor structure comprising a first gate electrode (210); (b) forming a first set of organic spacers (213) adjacent to said first electrode; (c) depositing a first photo mask (215) over the structure; and (d) simultaneously removing the first set of organic spacers and the first photo mask.
公开/授权文献
- US20090017587A1 Disposable organic spacers 公开/授权日:2009-01-15