发明授权
- 专利标题： Piezoelectric thin-film resonator and filter
- 专利标题（中）： 压电薄膜谐振器和滤波器
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申请号： US11430184申请日： 2006-05-09
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公开(公告)号： US07579761B2公开(公告)日： 2009-08-25
- 发明人: Tokihiro Nishihara , Tsuyoshi Yokoyama , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
- 申请人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
- 申请人地址： JP Yokohama JP Kawasaki
- 专利权人： Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人： Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人地址： JP Yokohama JP Kawasaki
- 代理机构： Arent Fox LLP.
- 优先权： JP2005-137877 20050510
- 主分类号： H01L41/047
- IPC分类号： H01L41/047
摘要：
A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the lower electrode; and an upper electrode that is formed on the piezoelectric film. In the piezoelectric thin-film resonator, the upper electrode has a greater film thickness than the lower electrode.
公开/授权文献
- US20060255693A1 Piezoelectric thin-film resonator and filter 公开/授权日：2006-11-16