Invention Grant
US07583361B2 System for controlling a dual mover assembly for an exposure apparatus
有权
用于控制用于曝光装置的双推动器组件的系统
- Patent Title: System for controlling a dual mover assembly for an exposure apparatus
- Patent Title (中): 用于控制用于曝光装置的双推动器组件的系统
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Application No.: US11369493Application Date: 2006-03-07
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Publication No.: US07583361B2Publication Date: 2009-09-01
- Inventor: Yi-Ping Hsin , Hideyuki Hashimoto , Jin Nishikawa , Bausan Yuan , Douglas C. Watson
- Applicant: Yi-Ping Hsin , Hideyuki Hashimoto , Jin Nishikawa , Bausan Yuan , Douglas C. Watson
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Roeder & Broder LLP
- Main IPC: G03B27/58
- IPC: G03B27/58

Abstract:
A precision assembly (210) for positioning a device (226) includes a stage (260) that retains the device (226), a dual mover assembly (228) that moves the stage (260), and the device (226) along a movement axis (266), a measurement system (222) and a control system (224). The dual mover assembly (228) includes a first mover (262) that moves the stage (260) along the movement axis (266) and a second mover (264) that moves the device (226) along the movement axis (266). The second mover (264) is rigidly coupled to the first mover (262) so that movement of the first mover (262) results in movement of the second mover (264). Further, the total output of the dual mover assembly (228) along the movement axis (266) is equal to the sum of the movement of the first mover (262) and the movement of the second mover (264). The measurement system (222) measures a movement position along the movement axis (266). The control system (224) controls the dual mover assembly (228) utilizing the movement position. The control system (224) is designed to effectively decouple the control of the first mover (262) from the control of the second mover (264). Further, the control system (224) includes a quantization feedforward loop.
Public/Granted literature
- US20070211237A1 System for controlling a dual mover assembly for an exposure apparatus Public/Granted day:2007-09-13
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