Invention Grant
- Patent Title: Non-volatile memory device and method of fabricating the same
- Patent Title (中): 非易失性存储器件及其制造方法
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Application No.: US11200491Application Date: 2005-08-09
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Publication No.: US07586137B2Publication Date: 2009-09-08
- Inventor: Ki-chul Kim , Geum-jong Bae , In-wook Cho , Byoung-jin Lee , Sang-su Kim , Jin-hee Kim , Byou-ree Lim
- Applicant: Ki-chul Kim , Geum-jong Bae , In-wook Cho , Byoung-jin Lee , Sang-su Kim , Jin-hee Kim , Byou-ree Lim
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Mills & Onello, LLP.
- Priority: KR10-2004-0062486 20040809; KR10-2004-0108429 20041218
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
A non-volatile memory device having an asymmetric channel structure is provided. The non-volatile memory device includes a semiconductor substrate, a source region and a drain region which are formed in the semiconductor substrate and doped with n-type impurities, a trapping structure which includes a tunneling layer, which is disposed on a predetermined region of the semiconductor substrate and through which charge carriers are tunneled, and a charge trapping layer, which is formed on the tunneling layer and traps the tunneled charge carriers, a gate insulating layer which is formed on the trapping structure and the exposed semiconductor substrate, a gate electrode which is formed on the gate insulating layer, and a channel region which is formed between the source region and the drain region and includes a first channel region formed on a lower part of the trapping structure and a second channel region formed on a lower part of the gate insulating layer, the threshold voltage of the first channel region being lower than that of the second channel region.
Public/Granted literature
- US20060027854A1 Non-volatile memory device and method of fabricating the same Public/Granted day:2006-02-09
Information query
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