Invention Grant
US07589323B2 Superconducting X-ray detector and X-ray analysis apparatus using the same
有权
超导X射线检测器和使用其的X射线分析仪器
- Patent Title: Superconducting X-ray detector and X-ray analysis apparatus using the same
- Patent Title (中): 超导X射线检测器和使用其的X射线分析仪器
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Application No.: US11794288Application Date: 2006-01-24
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Publication No.: US07589323B2Publication Date: 2009-09-15
- Inventor: Keiichi Tanaka , Akikazu Odawara , Satoshi Nakayama
- Applicant: Keiichi Tanaka , Akikazu Odawara , Satoshi Nakayama
- Applicant Address: JP
- Assignee: SII NanoTechnology Inc.
- Current Assignee: SII NanoTechnology Inc.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2005-015179 20050124
- International Application: PCT/JP2006/300987 WO 20060124
- International Announcement: WO2006/078024 WO 20060727
- Main IPC: H01L27/18
- IPC: H01L27/18

Abstract:
To provide a superconducting X-ray detector capable of carrying out a measurement by a high energy resolution by restraining a reduction in a sensitivity by a self magnetic field. A superconducting X-ray detector comprising a temperature detector 6 for detecting a temperature change by heat generated when an X-ray is absorbed, and a heat link 3 for controlling a heat flow amount of escaping the generated heat to a support board i, wherein the temperature detector 6 comprises a heat conducting multilayer thin film, the superconducting X-ray detector is constituted by a structure of providing a superconductor layer 4 above the heat link 3 and providing an insulating member 2 between the superconductor layer 4 and the temperature detector 6, the superconductor layer 4 and the temperature detector 6 are connected by a superconducting wiring 7 and uses materials by which superconducting transition temperatures of the superconductor layer 4 and the superconducting wiring 7 are higher than a superconducting transition temperature of the temperature detector 6.
Public/Granted literature
- US20070291902A1 Superconducting X-Ray Detector And X-Ray Analysis Apparatus Using The Same Public/Granted day:2007-12-20
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