发明授权
- 专利标题： Method and apparatus for transporting a substrate using non-newtonian fluid
- 专利标题（中）： 使用非牛顿流体输送基材的方法和装置
-
申请号： US12173661申请日： 2008-07-15
-
公开(公告)号： US07591613B2公开(公告)日： 2009-09-22
- 发明人: John M. de Larios , Mike Ravkin , John Parks , Mikhail Korolik , Fred C. Redeker
- 申请人： John M. de Larios , Mike Ravkin , John Parks , Mikhail Korolik , Fred C. Redeker
- 申请人地址： US CA Fremont
- 专利权人： Lam Research Corporation
- 当前专利权人： Lam Research Corporation
- 当前专利权人地址： US CA Fremont
- 代理机构： Martine Penilla & Gencarella, LLP
- 主分类号： B65G51/16
- IPC分类号： B65G51/16
摘要：
A method for transporting a substrate is provided. In this method, a non-Newtonian fluid is provided and the substrate is suspended in the non-Newtonian fluid. The non-Newtonian fluid is capable of supporting the substrate. Thereafter, a supply force is applied on the non-Newtonian fluid to cause the non-Newtonian fluid to flow, whereby the flow is capable of moving the substrate along a direction of the flow. Apparatuses and systems for transporting the substrate using the non-Newtonian fluid also are described.
公开/授权文献
信息查询
IPC分类:
