发明授权
US07591624B2 Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
失效
采用FOUP适配板的光栅存储盒(RSP)传输系统
- 专利标题: Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
- 专利标题(中): 采用FOUP适配板的光栅存储盒(RSP)传输系统
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申请号: US11306708申请日: 2006-01-09
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公开(公告)号: US07591624B2公开(公告)日: 2009-09-22
- 发明人: Philip L. Campbell , David J. Pinckney , Edward Sherwood , Uldis A. Ziemins
- 申请人: Philip L. Campbell , David J. Pinckney , Edward Sherwood , Uldis A. Ziemins
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Yuanmin Cai
- 主分类号: H01L21/677
- IPC分类号: H01L21/677
摘要:
A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.
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