发明授权
US07591624B2 Reticle storage pod (RSP) transport system utilizing FOUP adapter plate 失效
采用FOUP适配板的光栅存储盒(RSP)传输系统

Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
摘要:
A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.
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