公开(公告)号：US07591624B2

公开(公告)日：2009-09-22

申请号：US11306708

申请日：2006-01-09

申请人： Philip L. Campbell ,  David J. Pinckney ,  Edward Sherwood ,  Uldis A. Ziemins

发明人： Philip L. Campbell ,  David J. Pinckney ,  Edward Sherwood ,  Uldis A. Ziemins

IPC分类号： H01L21/677

CPC分类号： H01L21/67769 ,  H01L21/67276 ,  H01L21/67359 ,  H01L21/67379 ,  H01L21/68707 ,  Y10S414/14

摘要： A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.

摘要翻译： FOUP（前开口统一舱）系统和用于运输晶片的掩模版系统和掩模版系统的组合，后者用于将掩模版从第一制造位置传送到另一位置的另一位置，以及 其提供统一的系统，使得能够在这些站点之间自动和可跟踪地传送标线。 提供了一种改进的FOUP基础结构，其适于保持掩模版并且能够在制造场地中使用现有设备，其仅需要对设备进行最小的修改，以使后者普遍适用于系统的组合 。

公开(公告)号：US20090297299A1

公开(公告)日：2009-12-03

申请号：US12537649

申请日：2009-08-07

申请人： Philip L. Campbell ,  David J. Pinckney ,  Edward Sherwood ,  Uldis A. Ziemins

发明人： Philip L. Campbell ,  David J. Pinckney ,  Edward Sherwood ,  Uldis A. Ziemins

IPC分类号： H01L21/677

CPC分类号： H01L21/67769 ,  H01L21/67276 ,  H01L21/67359 ,  H01L21/67379 ,  H01L21/68707 ,  Y10S414/14

摘要： A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.

摘要翻译： FOUP（前开口统一舱）系统和用于运输晶片的掩模版系统和掩模版系统的组合，后者用于将掩模版从第一制造位置传送到另一位置的另一位置，以及 其提供统一的系统，使得能够在这些站点之间自动和可跟踪地传送标线。 提供了一种改进的FOUP基础结构，其适于保持掩模版并且能够在制造场地中使用现有设备，其仅需要对设备进行最小的修改，以使后者普遍适用于系统的组合 。

公开(公告)号：US07887277B2

公开(公告)日：2011-02-15

申请号：US12537649

申请日：2009-08-07

申请人： Philip L. Campbell ,  David J. Pinckney ,  Edward Sherwood ,  Uldis A. Ziemins

发明人： Philip L. Campbell ,  David J. Pinckney ,  Edward Sherwood ,  Uldis A. Ziemins

IPC分类号： H01L21/677

CPC分类号： H01L21/67769 ,  H01L21/67276 ,  H01L21/67359 ,  H01L21/67379 ,  H01L21/68707 ,  Y10S414/14

摘要： A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.

摘要翻译： FOUP（前开口统一舱）系统和用于运输晶片的掩模版系统和掩模版系统的组合，后者用于将掩模版从第一制造位置传送到另一位置的另一位置，以及 其提供统一的系统，使得能够在这些站点之间自动和可跟踪地传送标线。 提供了一种改进的FOUP基础结构，其适于保持掩模版并且能够在制造场地中使用现有设备，其仅需要对设备进行最小的修改，以使后者普遍适用于系统的组合 。

公开(公告)号：US07103458B2

公开(公告)日：2006-09-05

申请号：US10709351

申请日：2004-04-29

申请人： Philip L. Campbell ,  Francis F. Szenher ,  Uldis A. Ziemins

发明人： Philip L. Campbell ,  Francis F. Szenher ,  Uldis A. Ziemins

IPC分类号： H04B1/69 ,  G06F19/00

CPC分类号： H04B1/713 ,  H04W16/14

摘要： Communication between a controller and a set of automated vehicles is improved by use of an RF link that employs a high frequency spread spectrum modem that establishes a low noise link in a high noise industrial environment and also shares the relevant frequency range with a wireless telephone system.

摘要翻译： 通过使用RF链路来改善控制器和一组自动车辆之间的通信，所述RF链路采用在高噪声工业环境中建立低噪声链路并且还与无线电话系统共享相关频率范围的高频扩频调制解调器 。

公开(公告)号：US07677180B2

公开(公告)日：2010-03-16

申请号：US11160111

申请日：2005-06-09

申请人： Philip L. Campbell ,  Uldis A. Ziemins

发明人： Philip L. Campbell ,  Uldis A. Ziemins

IPC分类号： B60L13/04

CPC分类号： H01L21/67709 ,  H01L21/67715 ,  H01L21/67724

摘要： A steering apparatus and method is implemented that allows high speed, clean, particle-free transport of a semiconductor wafer or lithographic reticle on a transport vehicle at various positions on the vehicle track, especially when entering and exiting turns. Three computer-controlled electro-magnets are mounted at the left, center, and right side of a front steering truck, and are energized to attract strategically placed permanent magnet material mounted on a side of the track where the vehicle enters or exits a turn. The transport vehicle can be levitated by an air cushion or travel on wheels, and controlled by electromotive or electromagnetic forces about the track. Using the steering electro-magnets as a LVDT, a computer processor monitors the location of the transport vehicle about the track.

摘要翻译： 实现了一种转向装置和方法，其允许半导体晶片或光刻掩模版在车辆轨道上的各个位置上的运输车辆上高速，清洁，无颗粒地传输，特别是在进入和离开转弯时。 三个计算机控制的电磁体安装在前转向车的左，中，右侧，并被通电以吸引安装在车辆进入或离开转弯的轨道一侧的策略性放置的永久磁铁材料。 运输车辆可以由气垫悬挂或在车轮上行驶，并且通过围绕轨道的电动或电磁力来控制。 使用转向电磁铁作为LVDT，计算机处理器监视运输车辆围绕轨道的位置。

公开(公告)号：US07720956B2

公开(公告)日：2010-05-18

申请号：US12167275

申请日：2008-07-03

申请人： Philip L. Campbell ,  Paul D. Hand ,  Edward Sherwood

发明人： Philip L. Campbell ,  Paul D. Hand ,  Edward Sherwood

IPC分类号： G06F15/173

CPC分类号： H04L43/0817

摘要： A system and storage medium for providing continuous communication between passive and active equipment are provided. The system includes a conversion unit coupled to at least one the passive and active equipment, which monitors signals received from the equipment. The signals relate to an equipment state. Upon detecting a state change, the system converts a signal associated with the state change to a TCP/IP-formatted request. The system also includes a message handler coupled to the conversion unit, which receives the request from the conversion unit and transmits the request to a host system. The message handler also removes TCP/IP formatting from the request resulting in a file transfer protocol message. The conversion unit converts the file transfer protocol message to a signal and responds to the signal by the equipment. The conversion includes decoding the file transfer protocol message and setting a signal line to a requested state.

摘要翻译： 提供了一种用于在被动和主动设备之间提供连续通信的系统和存储介质。 该系统包括耦合到至少一个被动和主动设备的转换单元，其监测从设备接收的信号。 这些信号与设备状态有关。 在检测到状态改变时，系统将与状态改变相关联的信号转换成TCP / IP格式的请求。 该系统还包括耦合到转换单元的消息处理器，其接收来自转换单元的请求并将该请求发送到主机系统。 消息处理程序还从请求中删除TCP / IP格式，导致文件传输协议消息。 转换单元将文件传输协议消息转换为信号并由设备响应信号。 该转换包括解码文件传输协议消息并将信号线设置为请求状态。

公开(公告)号：US07992734B2

公开(公告)日：2011-08-09

申请号：US11972685

申请日：2008-01-11

申请人： Philip L. Campbell ,  Denise B. Joe ,  Edward Sherwood

发明人： Philip L. Campbell ,  Denise B. Joe ,  Edward Sherwood

IPC分类号： B66C19/00

CPC分类号： H01L21/67294 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67769 ,  Y10S414/14

摘要： A system for reading substrate carriers that includes at least one overhead transport vehicle (OHT) utilizing at least one device for at least one of sensing and/or reading a substrate carrier, and/or wafers arranged therein, when the substrate carrier is proximate the at least one overhead transport vehicle. A method of sensing or reading a substrate carrier includes sensing and/or reading a substrate carrier and/or wafers arranged therein with the overhead transport vehicle.

摘要翻译： 一种用于读取衬底载体的系统，其包括至少一个架空运输车辆（OHT），所述至少一个架空运输车辆（OHT）利用至少一个用于感测和/或读取衬底载体的至少一个装置和/或布置在其中的晶片，当衬底载体接近于 至少一个架空运输车辆。 感测或读取衬底载体的方法包括用架空运输车辆检测和/或读取布置在其中的衬底载体和/或晶片。

公开(公告)号：US20090178992A1

公开(公告)日：2009-07-16

申请号：US11972685

申请日：2008-01-11

申请人： Philip L. Campbell ,  Denise B. Joe ,  Edward Sherwood

发明人： Philip L. Campbell ,  Denise B. Joe ,  Edward Sherwood

IPC分类号： B66C19/00

CPC分类号： H01L21/67294 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67769 ,  Y10S414/14

摘要： A system for reading substrate carriers that includes at least one overhead transport vehicle (OHT) utilizing at least one device for at least one of sensing and/or reading a substrate carrier, and/or wafers arranged therein, when the substrate carrier is proximate the at least one overhead transport vehicle. A method of sensing or reading a substrate carrier includes sensing and/or reading a substrate carrier and/or wafers arranged therein with the overhead transport vehicle.

摘要翻译： 一种用于读取衬底载体的系统，其包括至少一个架空运输车辆（OHT），所述至少一个架空运输车辆（OHT）利用至少一个用于感测和/或读取衬底载体的至少一个装置和/或布置在其中的晶片，当衬底载体接近于 至少一个架空运输车辆。 感测或读取衬底载体的方法包括用架空运输车辆检测和/或读取布置在其中的衬底载体和/或晶片。

公开(公告)号：US20080259953A1

公开(公告)日：2008-10-23

申请号：US12167275

申请日：2008-07-03

申请人： Philip L. Campbell ,  Paul D. Hand ,  Edward Sherwood

发明人： Philip L. Campbell ,  Paul D. Hand ,  Edward Sherwood

IPC分类号： H04J3/16

CPC分类号： H04L43/0817

摘要： A system and storage medium for providing continuous communication between passive and active equipment are provided. The system includes a conversion unit coupled to at least one the passive and active equipment, which monitors signals received from the equipment. The signals relate to an equipment state. Upon detecting a state change, the system converts a signal associated with the state change to a TCP/IP-formatted request. The system also includes a message handler coupled to the conversion unit, which receives the request from the conversion unit and transmits the request to a host system. The message handler also removes TCP/IP formatting from the request resulting in a file transfer protocol message. The conversion unit converts the file transfer protocol message to a signal and responds to the signal by the equipment. The conversion includes decoding the file transfer protocol message and setting a signal line to a requested state.

摘要翻译： 提供了一种用于在被动和主动设备之间提供连续通信的系统和存储介质。 该系统包括耦合到至少一个被动和主动设备的转换单元，其监测从设备接收的信号。 这些信号与设备状态有关。 在检测到状态改变时，系统将与状态改变相关联的信号转换成TCP / IP格式的请求。 该系统还包括耦合到转换单元的消息处理器，其接收来自转换单元的请求并将该请求发送到主机系统。 消息处理程序还从请求中删除TCP / IP格式，导致文件传输协议消息。 转换单元将文件传输协议消息转换为信号并由设备响应信号。 该转换包括解码文件传输协议消息并将信号线设置为请求状态。

公开(公告)号：US07426555B2

公开(公告)日：2008-09-16

申请号：US10709867

申请日：2004-06-02

申请人： Philip L. Campbell ,  Paul D. Hand ,  Edward Sherwood

发明人： Philip L. Campbell ,  Paul D. Hand ,  Edward Sherwood

IPC分类号： G06F15/173

CPC分类号： H04L43/0817

摘要： Exemplary embodiments of the invention include a method and system for providing continuous communication between passive equipment and active equipment. The method includes monitoring signals received from a passive equipment or active equipment. The signals relate to at least one equipment state. Upon detecting a state change, the method also includes converting a signal associated with the state change to a TCP/IP-formatted request, and transmitting the request to a host system.

摘要翻译： 本发明的示例性实施例包括用于在被动设备和主动设备之间提供连续通信的方法和系统。 该方法包括监视从无源设备或主动设备接收的信号。 这些信号涉及至少一个设备状态。 在检测到状态改变时，该方法还包括将与状态改变相关联的信号转换为TCP / IP格式的请求，并将该请求发送到主机系统。