公开(公告)号：US09033638B2

公开(公告)日：2015-05-19

申请号：US11736188

申请日：2007-04-17

Applicant: Jeffrey P Gifford ,  David J. Pinckney ,  Peter J. Shaffer ,  Uldis A. Ziemins

Inventor： Jeffrey P Gifford ,  David J. Pinckney ,  Peter J. Shaffer ,  Uldis A. Ziemins

IPC: H01L21/677 ,  B65G1/12

CPC classification number: B65G1/12 ,  Y10S414/14

Abstract: A storage system for items such as substrate carriers includes at least one stocker including a plurality of storage areas each adapted to store at least one storage device. At least one movable support is arranged on the at least one stocker. A control controls movement of the at least one movable support at least between a first position wherein the at least one movable support receives the at least one storage device outside one of the storage areas and a second position wherein the at least one movable support is arranged substantially within the one of the storage areas.

Abstract translation: 用于诸如衬底载体的物品的存储系统包括至少一个存储器，其包括多个存储区域，每个存储区域适于存储至少一个存储设备。 至少一个可移动支撑件布置在所述至少一个储料器上。 至少在第一位置和第二位置之间至少在第一位置和第二位置之间控制所述至少一个可移动支撑件的运动，其中所述至少一个可移动支撑件容纳至少一个存储装置，其中所述至少一个可移动支撑件被布置 基本上在一个存储区域内。

公开(公告)号：US20080240892A1

公开(公告)日：2008-10-02

申请号：US11692226

申请日：2007-03-28

Applicant: Louise C. Courtois ,  Jeffrey P. Gifford ,  David J. Pinckney ,  Uldis A. Ziemins

Inventor： Louise C. Courtois ,  Jeffrey P. Gifford ,  David J. Pinckney ,  Uldis A. Ziemins

IPC: B65G49/07

CPC classification number: H01L21/67775 ,  H01L21/67769

Abstract: A storage buffer system for an automated material handling system (AMHS) includes a retractable buffer device disposed in proximity to a processing tool, the retractable buffer device having an extended position disposed directly below an overhead transport (OHT) vehicle path. The retractable buffer device further includes a retracted position that is removed from a process aisle space. In the extended position, the retractable buffer device is configured to facilitate loading and unloading of product therein without the use of lateral motion capability of an OHT vehicle.

Abstract translation: 一种用于自动化材料处理系统（AMHS）的存储缓冲系统包括设置在处理工具附近的伸缩缓冲装置，该伸缩缓冲装置具有直接位于架空运输（OHT）车辆路径下方的延伸位置。 可伸缩缓冲装置还包括从过程通道空间移除的缩回位置。 在伸出位置，可伸缩缓冲装置构造成便于在其中装载和卸载产品，而不使用OHT车辆的横向运动能力。

公开(公告)号：US06960772B1

公开(公告)日：2005-11-01

申请号：US10709961

申请日：2004-06-09

Applicant: Gary J. Johnson ,  David J. Pinckney

Inventor： Gary J. Johnson ,  David J. Pinckney

IPC: H01J37/00

CPC classification number: H01J37/20 ,  H01J2237/2007 ,  H01J2237/30438 ,  H01J2237/31788

Abstract: A carrier for the masks used in Electron Projection Lithography, or other workpieces used in nanotechnology fields, comprises a rectangular frame having a set of four electrostatic chucks in the top surface for holding the mask above a central aperture that has an electron absorber on the bottom for suppressing backscattering; the frame being supported by a bottom carrier that grips the frame with a set of flexures flexible in the z-direction, stiff in an azimuthal direction and flexible in a radial direction.

Abstract translation: 用于电子投影平版印刷术中的掩模的载体或纳米技术领域中使用的其他工件包括在顶表面中具有一组四个静电卡盘的矩形框架，用于将掩模保持在位于底部的电子吸收体的中心孔上方 用于抑制后向散射; 框架由底部托架支撑，该底托架通过在z方向上具有柔性的一组挠曲来夹持框架，在方位角方向上是刚性的并且在径向上是柔性的。

公开(公告)号：US06818906B1

公开(公告)日：2004-11-16

申请号：US10604079

申请日：2003-06-25

Applicant: John G. Hartley ,  Rodney A. Kendall ,  David J. Pinckney ,  Richard A. Rieland

Inventor： John G. Hartley ,  Rodney A. Kendall ,  David J. Pinckney ,  Richard A. Rieland

IPC: G02B500

CPC classification number: H01J37/3045

Abstract: A system for supporting and adjusting the position of an object in a vacuum includes inner and outer support rings that are connected by flexible mounts that are compliant along one axis and stiff along other axes, and drivers extending through the wall of the vacuum chamber that move the supports independently along their respective axes. At least the inner support is clamped after adjustment by a clamp that exerts a strong clamping pressure while exerting transverse force only less than a threshold selected to avoid motion after adjustment.

Abstract translation: 用于支撑和调节物体在真空中的位置的系统包括内和外支撑环，所述支撑环和外支撑环通过沿着一个轴线顺应并且沿其它轴线刚性的柔性支架连接，并且驱动器延伸穿过真空室的壁移动 支撑件沿其各自的轴线独立。 至少内部支撑件在通过夹具调节之后夹紧，该夹具施加强大的夹紧压力，同时施加横向力仅小于所选择的阈值，以避免调整后的运动。

公开(公告)号：US08113123B2

公开(公告)日：2012-02-14

申请号：US12706676

申请日：2010-02-16

Applicant: Clayton D. Menser, Jr. ,  David J. Pinckney ,  Uldis A. Ziemins

Inventor： Clayton D. Menser, Jr. ,  David J. Pinckney ,  Uldis A. Ziemins

IPC: B61B3/00

CPC classification number: B61B3/02 ,  B66F11/04 ,  H01L21/67733

Abstract: A overhead transport service vehicle system includes a carriage frame structured and arranged to carry a user. A hoisting mechanism utilizes at least one lifting device for lifting and lowering the carriage frame and at least one moving device for causing movement of the hoisting mechanism along one of a track or rail. A control controls at least one of the at least one lifting device and the at least one moving device.

Abstract translation: 架空运输服务车辆系统包括构造和布置为承载用户的托架框架。 提升机构使用至少一个提升装置来提升和降低托架框架和至少一个运动装置，用于使提升机构沿轨道或轨道中的一个移动。 控制器控制至少一个提升装置和至少一个移动装置中的至少一个。

公开(公告)号：US20080260504A1

公开(公告)日：2008-10-23

申请号：US11736188

申请日：2007-04-17

Applicant: Jeffrey P. Gifford ,  David J. Pinckney ,  Peter J. Shaffer ,  Uldis A. Ziemins

Inventor： Jeffrey P. Gifford ,  David J. Pinckney ,  Peter J. Shaffer ,  Uldis A. Ziemins

IPC: B65G1/12

CPC classification number: B65G1/12 ,  Y10S414/14

Abstract: A storage system for items such as substrate carriers includes at least one stocker including a plurality of storage areas each adapted to store at least one storage device. At least one movable support is arranged on the at least one stocker. A control controls movement of the at least one movable support at least between a first position wherein the at least one movable support receives the at least one storage device outside one of the storage areas and a second position wherein the at least one movable support is arranged substantially within the one of the storage areas.

Abstract translation: 用于诸如衬底载体的物品的存储系统包括至少一个存储器，其包括多个存储区域，每个存储区域适于存储至少一个存储设备。 至少一个可移动支撑件布置在所述至少一个储料器上。 至少在第一位置和第二位置之间至少在第一位置和第二位置之间控制所述至少一个可移动支撑件的运动，其中所述至少一个可移动支撑件容纳至少一个存储装置，其中所述至少一个可移动支撑件被布置 基本上在一个存储区域内。

公开(公告)号：US06461680B2

公开(公告)日：2002-10-08

申请号：US09471613

申请日：1999-12-23

Applicant: David J. Pinckney

Inventor： David J. Pinckney

IPC: B05D302

CPC classification number: C23C26/00 ,  C23C18/1605 ,  H01J9/236 ,  H01J2237/152 ,  H05K1/0306 ,  H05K3/108 ,  H05K3/426 ,  Y10T29/49117

Abstract: The present invention relates to a method and apparatus of fabricating electromagnetic coil vanes. The method involves photolithographically exposing high resolution, dense wire patterns in a flash coat of copper, on both sides of a ceramic vane substrate. The substrate can be pre-drilled with a through hole to connect the two copper coil patterns. Additional copper is then deposited on both high resolution patterns and in the through hole by plating until the desired thickness is obtained. A firing operation is then performed that eutectically bonds the copper to the ceramic.

Abstract translation: 本发明涉及制造电磁线圈叶片的方法和装置。 该方法包括在陶瓷叶片基板的两侧光刻地暴露在铜的闪光涂层中的高分辨率，致密的线图案。 基板可以预先钻出一个通孔，以连接两个铜线圈图案。 然后将另外的铜沉积在两个高分辨率图案上，并在通孔中通过电镀沉积，直到获得所需的厚度。 然后进行烧结操作，其将铜共晶地结合到陶瓷上。

公开(公告)号：US06414313B1

公开(公告)日：2002-07-02

申请号：US09323010

申请日：1999-06-01

Applicant: Michael S. Gordon ,  Rodney A. Kendall ,  David J. Pinckney

Inventor： Michael S. Gordon ,  Rodney A. Kendall ,  David J. Pinckney

IPC: H01J3709

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/09 ,  H01J37/3174

Abstract: A beam-limiting aperture truncates selected portions of a charged particle beam illuminating portions such as subfields of a patterned reticle of a charged particle beam projection lithography tool and then projects a pattern of charged particles onto a target in a charged particle beam lithography tool. The respective portions of the reticle are patterned in accordance with respective portions of an integrated circuit or other desired pattern and may have differing transmissivities; altering beam current at the target even when source beam current remains substantially constant. The portion of the beam which is truncated, thus altering the particle trajectory semi-angle and numerical aperture of the tool is controlled in accordance with the transmissivity of the reticle portion to enhance resolution to near optimal limits.

Abstract translation: 光束限制孔截取带电粒子束的选定部分，照射部分，例如带电粒子束投影光刻工具的图案化掩模版的子场，然后将带电粒子的图案投射到带电粒子束光刻工具中的靶上。 掩模版的各个部分根据集成电路或其他所需图案的相应部分进行图案化，并且可具有不同的透射率; 即使当源光束电流保持基本恒定时，也改变目标处的光束电流。 根据标线片部分的透射率来控制截断的梁的部分，从而改变工具的粒子轨迹半角和数值孔径，以将分辨率提高到接近最佳极限。

公开(公告)号：US20130190933A1

公开(公告)日：2013-07-25

申请号：US13354717

申请日：2012-01-20

Applicant: Robert L. DeAngelis ,  Stephen J. Graziano ,  David Longinott ,  Mrunal B. Patwa ,  David J. Pinckney ,  David M. Sweeney

Inventor： Robert L. DeAngelis ,  Stephen J. Graziano ,  David Longinott ,  Mrunal B. Patwa ,  David J. Pinckney ,  David M. Sweeney

IPC: G05B13/00

CPC classification number: G05B13/021 ,  F24F3/1607 ,  F24F2007/001 ,  F24F2140/40

Abstract: An energy efficient air flow control system includes exhaust devices of a building air flow management system. Each of the exhaust devices includes a controller for controlling functions of its respective exhaust device. A first sensor is coupled to each of the exhaust devices and respective controllers. A computer is coupled to the exhaust devices via respective controllers. A second sensor determines a fan speed of a supply air fan, and the second sensor is coupled to the computer. Logic executable by the computer receives user-selected settings for controlling operation of the exhaust devices, collects data from the controllers via corresponding first sensors and from the second sensors, applies the data to the settings, and modifies operation of the system via a controller of at least one of the exhaust devices when, in response to applying the data, it is determined that a condition defined in the settings is met.

Abstract translation: 节能空气流量控制系统包括建筑空气流量管理系统的排气装置。 每个排气装置包括用于控制其排气装置的功能的控制器。 第一传感器耦合到每个排气装置和相应的控制器。 计算机经由相应的控制器耦合到排气装置。 第二传感器确定供气风扇的风扇速度，并且第二传感器耦合到计算机。 由计算机执行的逻辑接收用户选择的设置，用于控制排气装置的操作，通过对应的第一传感器从控制器收集数据，并从第二传感器收集数据，将数据应用于设置，并通过控制器修改系统的操作 排气装置中的至少一个当响应于应用数据而确定满足设置中定义的条件时。

公开(公告)号：US07854202B2

公开(公告)日：2010-12-21

申请号：US11828657

申请日：2007-07-26

Applicant: Clayton D. Menser, Jr. ,  David J. Pinckney ,  Uldis A. Ziemins

Inventor： Clayton D. Menser, Jr. ,  David J. Pinckney ,  Uldis A. Ziemins

IPC: B61B3/00

CPC classification number: B61B3/02 ,  B66F11/04 ,  H01L21/67733

Abstract: A overhead transport service vehicle system includes a carriage frame structured and arranged to carry a user. A hoisting mechanism utilizes at least one lifting device for lifting and lowering the carriage frame and at least one moving device for causing movement of the hoisting mechanism along one of a track or rail. A control controls at least one of the at least one lifting device and the at least one moving device.

Abstract translation: 架空运输服务车辆系统包括构造和布置为承载用户的托架框架。 提升机构使用至少一个提升装置来提升和降低托架框架和至少一个运动装置，用于使提升机构沿轨道或轨道中的一个移动。 控制器控制至少一个提升装置和至少一个移动装置中的至少一个。