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US07598543B2 Semiconductor memory component with body region of memory cell having a depression and a graded dopant concentration 失效
具有存储单元体区域的半导体存储器组件具有凹陷和渐变的掺杂剂浓度

Semiconductor memory component with body region of memory cell having a depression and a graded dopant concentration
摘要:
A semiconductor memory component comprises at least one memory cell. The memory cell comprises a semiconductor body comprised of a body region, a drain region and a source region, a gate dielectric, and a gate electrode. The body region comprises a first conductivity type and a depression between the source and drain regions, and the source and drain regions comprise a second conductivity type. The gate electrode is arranged at least partly in the depression and is insulated from the body, source, and drain regions by the gate dielectric. The body region further comprises a first continuous region with a first dopant concentration and a second continuous region with a second dopant concentration greater than the first dopant concentration. The first continuous region adjoins the drain region, the depression and the source region, and the second region is arranged below the first region and adjoins the first region.
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