发明授权
- 专利标题： Method of classifying defects using multiple inspection machines
- 专利标题（中）： 使用多台检测机分类缺陷的方法
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申请号： US10762091申请日： 2004-01-20
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公开(公告)号： US07602962B2公开(公告)日： 2009-10-13
- 发明人: Atsushi Miyamoto , Hirohito Okuda , Toshifumi Honda , Yuji Takagi , Takashi Hiroi
- 申请人： Atsushi Miyamoto , Hirohito Okuda , Toshifumi Honda , Yuji Takagi , Takashi Hiroi
- 申请人地址： JP Tokyo
- 专利权人： Hitachi High-Technologies Corporation
- 当前专利权人： Hitachi High-Technologies Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Townsend and Townsend and Crew LLP
- 优先权： JP2003-047290 20030225
- 主分类号： G06K9/00
- IPC分类号： G06K9/00
摘要：
The present invention provides a method of classifying defects wherein defects are detected in a first inspection machine. The detected defects are then reviewed by a second inspection machine. A sampling rate for review by the second inspection machine is determined by a defect classifier in the first inspection machine.
公开/授权文献
- US20040218806A1 Method of classifying defects 公开/授权日：2004-11-04
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