发明授权
- 专利标题: Method and apparatus for scanning a workpiece through an ion beam
- 专利标题(中): 用于通过离子束扫描工件的方法和装置
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申请号: US11565267申请日: 2006-11-30
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公开(公告)号: US07608843B2公开(公告)日: 2009-10-27
- 发明人: Avrum Freytsis , Matthew C. Gwinn , Eric R. Harrington
- 申请人: Avrum Freytsis , Matthew C. Gwinn , Eric R. Harrington
- 申请人地址: US MA Billerica
- 专利权人: TEL Epion Inc.
- 当前专利权人: TEL Epion Inc.
- 当前专利权人地址: US MA Billerica
- 代理机构: Burns & Levinson LLP
- 代理商 David Gomes; Jerry Cohen
- 主分类号: H01J37/08
- IPC分类号: H01J37/08
摘要:
A method and apparatus 300 for better controlling scanning of a workpiece 330 through an ion beam path 306 provide for mounting a workpiece 330 on an elongated member, partially repetitively rotating the elongated member 500 around a point of rotation 368 to make repetitive scans of the workpiece 330 along and arcuate path 504 and bending the elongated member 500 at a joint 322 to move the one and out of the ion beam path 306 to facilitate attachment and removal of individual workpieces 330. A motor 315 used for the rotating may be suspended within a partial vacuum enclosure 304 against gravity for raising and lowering the elongated member and 500 a workpiece 306 for linear vertical scanning.
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