发明授权
- 专利标题: Target supplier
- 专利标题(中): 目标供应商
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申请号: US11723347申请日: 2007-03-19
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公开(公告)号: US07615766B2公开(公告)日: 2009-11-10
- 发明人: Masaki Nakano
- 申请人: Masaki Nakano
- 申请人地址: JP Tokyo JP Tokyo
- 专利权人: Komatsu Ltd.,Gigaphoton Inc.
- 当前专利权人: Komatsu Ltd.,Gigaphoton Inc.
- 当前专利权人地址: JP Tokyo JP Tokyo
- 代理机构: Wenderoth, Lind & Ponack, L.L.P.
- 优先权: JP2006-088245 20060328
- 主分类号: G01J1/18
- IPC分类号: G01J1/18
摘要:
A target supplier accelerates a target material injected from a nozzle such that a velocity of the target material after accelerated is kept within a predetermined range. The target supplier includes: a target nozzle that injects a target material in a liquid droplet state or solid particle state; an electric charge supplying unit that supplies electric charge to the target material; a charge amount measuring unit that measures an amount of the electric charge supplied to the target material by the electric charge supplying unit; a control unit that controls the electric charge supplying unit in a feedback manner based on a measurement result obtained by the charge amount measuring unit; and an accelerator that accelerates the target material supplied with the electric charge by the electric charge supplying unit.
公开/授权文献
- US20070228301A1 Target supplier 公开/授权日:2007-10-04