发明授权
- 专利标题： Imprinting polymer film on patterned substrate
- 专利标题（中）： 图案化基材上的压印聚合物膜
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申请号： US10558032申请日： 2004-05-20
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公开(公告)号： US07618510B2公开(公告)日： 2009-11-17
- 发明人: Li Tan , Yen-Peng Kong , Stella W. Pang , Albert F. Yee
- 申请人： Li Tan , Yen-Peng Kong , Stella W. Pang , Albert F. Yee
- 申请人地址： US MI Ann Arbor
- 专利权人： The Regents of the University of Michigan
- 当前专利权人： The Regents of the University of Michigan
- 当前专利权人地址： US MI Ann Arbor
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 国际申请： PCT/US2004/015889 WO 20040520
- 国际公布： WO2004/107403 WO 20041209
- 主分类号： B44C1/10
- IPC分类号： B44C1/10 ; B44C1/18 ; B44C1/24 ; B32B37/10 ; B32B37/16 ; B32B37/02 ; B05D1/02 ; B05D1/18 ; H01L21/302 ; B44C1/17 ; B32B37/06 ; B05D5/12 ; B05D1/26 ; H01L21/306
摘要：
A method of applying a pattern on a topography includes first applying a polymer film to an elastomer member, such as PDMS, to form a pad. The pad is then applied to a substrate having a varying topography under pressure. The polymer film is transferred to the substrate due to the plastic deformation of the polymer film under pressure compared to the elastic deformation of the PDMS member. Thus, upon removal of the pad from the substrate, the PDMS member pulls away from the polymer layer, thereby depositing the polymer layer upon the substrate.
公开/授权文献
- US20070056680A1 Imprinting polymer film on patterned substrate 公开/授权日：2007-03-15