Invention Grant
US07625695B2 Polymers for anti-reflective coatings, anti-reflective coating compositions and methods of forming a pattern using the same
失效
用于抗反射涂层的聚合物，抗反射涂料组合物和使用其形成图案的方法
- Patent Title: Polymers for anti-reflective coatings, anti-reflective coating compositions and methods of forming a pattern using the same
- Patent Title (中): 用于抗反射涂层的聚合物，抗反射涂料组合物和使用其形成图案的方法
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Application No.: US11844365Application Date: 2007-08-24
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Publication No.: US07625695B2Publication Date: 2009-12-01
- Inventor: Sang-Sik Moon , Ji-Young Kim , Joon-Seok Oh
- Applicant: Sang-Sik Moon , Ji-Young Kim , Joon-Seok Oh
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine & Whitt, PLLC
- Priority: KR10-2006-0080391 20060824; KR10-2007-0058132 20070614
- Main IPC: G03F7/40
- IPC: G03F7/40 ; C08F16/02 ; C08F116/02 ; C08F216/02 ; G03F7/11
Abstract:
An anti-reflective coating composition includes a solvent and about 20 to about 35 percent by weight of a polymer prepared by a condensation reaction of an acrylate polymer including a hydroxyl group with a derivative of muramic acid and a derivative of mandelic acid.
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