Invention Grant
- Patent Title: Hysteretic MEMS two-dimensional thermal device and method of manufacture
- Patent Title (中): 迟滞MEMS二维热装置及其制造方法
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Application No.: US11705738Application Date: 2007-02-14
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Publication No.: US07626311B2Publication Date: 2009-12-01
- Inventor: Paul J. Rubel
- Applicant: Paul J. Rubel
- Applicant Address: US CA Goleta
- Assignee: Innovative Micro Technology
- Current Assignee: Innovative Micro Technology
- Current Assignee Address: US CA Goleta
- Agent Jaquelin K. Spong
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
A MEMS hysteretic thermal device may have two passive beam segments driven by a current-carrying loop coupled to the surface of a substrate. The first beam segment is configured to move in a direction having a component perpendicular to the substrate surface, whereas the second beam segment is configured to move in a direction having a component parallel to the substrate surface. By providing this two-dimensional motion, a single MEMS hysteretic thermal device may by used to close a switch having at least one stationary contact affixed to the substrate surface.
Public/Granted literature
- US20070163255A1 Hysteretic MEMS two-dimensional thermal device and method of manufacture Public/Granted day:2007-07-19
Information query
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