公开(公告)号：US08690830B2

公开(公告)日：2014-04-08

申请号：US12801162

申请日：2010-05-26

Applicant: Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Steven S. Hovey ,  Paul J. Rubel

Inventor： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Steven S. Hovey ,  Paul J. Rubel

IPC: A61M1/00 ,  A61K9/22

CPC classification number: F04B43/043

Abstract: A micromechanical pumping system is formed on a substrate surface. The pumping system uses a pumping element which pumps a fluid through valves which move in a plane substantially parallel to the substrate surface. An electromagnetic actuating mechanism may also be fabricated on the surface of the substrate. Magnetic flux produced by a coil around a permeable core may be coupled to a permeable member affixed to a pumping element. The permeable member and pumping element may be configured to move in a plane parallel to the substrate. The electromagnetic actuating mechanism gives the pumping system a large throw and substantial force, such that the fluid pumped by the pumping system may be pumped through a transdermal cannula to deliver a therapeutic substance to the tissue underlying the skin of a patient.

Abstract translation: 在基板表面上形成微机械泵送系统。 泵送系统使用泵送元件，该元件通过在基本上平行于衬底表面的平面中移动的阀来泵送流体。 也可以在基板的表面上制造电磁致动机构。 线圈围绕可渗透芯体产生的磁通可以耦合到固定到泵送元件的可渗透构件。 可渗透构件和泵送元件可以构造成在平行于衬底的平面中移动。 电磁致动机构使泵送系统产生大的冲击力和相当大的力，使得由泵送系统泵送的流体可以泵送通过透皮插管，以将治疗物质递送到患者皮肤下方的组织。

公开(公告)号：US07944113B2

公开(公告)日：2011-05-17

申请号：US12318634

申请日：2009-01-05

Applicant: Paul J. Rubel

Inventor： Paul J. Rubel

IPC: H01L41/08

CPC classification number: F03G7/06 ,  B81B3/0059 ,  B81B2201/018 ,  B81B2201/032 ,  B81B2201/054 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H2061/008 ,  H02N10/00 ,  Y10T29/49105

Abstract: A MEMS hysteretic thermal actuator may have a plurality of beams disposed over a heating element formed on the surface of the substrate. The plurality of beams may be coupled to a passive beam which is not disposed over the heating element. One of the plurality of beams may be formed in a first plane parallel to the substrate, whereas another of the plurality of beams may be formed in a second plane closer to the surface of the substrate. When the heating element is activated, it heats the plurality of beams such that they move the passive beam in a trajectory that is neither parallel to nor perpendicular to the surface of the substrate. When the beams are cooled, they may move in a different trajectory, approaching the substrate before moving laterally across it to their initial positions. By providing one electrical contact on the distal end of the passive beam and another stationary electrical contact on the substrate surface, the MEMS hysteretic actuator may form a reliable electrical switch that is relatively simple to manufacture and operate.

Abstract translation: MEMS迟滞热致动器可以具有设置在形成在基板的表面上的加热元件上的多个光束。 多个光束可以耦合到未设置在加热元件上方的无源光束。 多个光束中的一个可以形成在平行于衬底的第一平面中，而多个光束中的另一个可以形成在靠近衬底表面的第二平面中。 当加热元件被激活时，它加热多个光束，使得它们以不平行于或垂直于衬底表面的轨迹移动被动束。 当梁被冷却时，它们可以以不同的轨迹移动，在横向移动到其初始位置之前接近基板。 通过在被动束的远端上提供一个电接触，并在衬底表面上提供另一个固定的电触点，MEMS滞后致动器可形成可靠的电开关，其制造和操作相对简单。

公开(公告)号：US07724121B2

公开(公告)日：2010-05-25

申请号：US11516489

申请日：2006-09-07

Applicant: Paul J. Rubel

Inventor： Paul J. Rubel

IPC: H01H71/18 ,  H01H61/00 ,  F16K31/02 ,  H02N10/00

CPC classification number: H01H1/0036 ,  B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  H01H2061/006 ,  H01H2061/008

Abstract: An improved MEMS thermal actuator has a cantilevered beam and a conductive circuit having two driving arms, an inner arm adjacent to the cantilevered beam, and an outer arm adjacent to the inner arm. Current flows through the inner and outer arms to heat the conductive circuit, causing it to expand relative to the cantilevered beam. A tether ties the conductive circuit to the cantilevered beam, so that upon expansion, the conductive circuit causes the cantilevered beam to deflect about its anchor point. However, only the inner arm of the driving beam is coupled to the cantilevered beam. Since the outer arm of the conductive circuit is not coupled to the cantilevered beam, the overall stiffness of the actuator may be decreased. In addition, serpentines may be placed in the outer arm of the conductive circuit, in order to further decrease the stiffness of this beam. The actuator may therefore be made more efficient, in that the deflection of the cantilevered beam may be increased for a given input current.

Abstract translation: 改进的MEMS热致动器具有悬臂梁和具有两个驱动臂的导电电路，与悬臂梁相邻的内臂以及与内臂相邻的外臂。 电流流过内臂和外臂以加热导电电路，使其相对于悬臂梁膨胀。 系统将导电电路连接到悬臂梁，使得在膨胀时，导电电路使悬臂梁绕其锚点偏转。 然而，只有驱动梁的内臂联接到悬臂梁。 由于导电电路的外臂未连接到悬臂梁，所以致动器的整体刚度可能会降低。 此外，蛇形管可以放置在导电电路的外臂中，以便进一步降低该梁的刚度。 因此，可以使致动器更有效，因为对于给定的输入电流，可以增加悬臂梁的偏转。

公开(公告)号：US07626311B2

公开(公告)日：2009-12-01

申请号：US11705738

申请日：2007-02-14

Applicant: Paul J. Rubel

Inventor： Paul J. Rubel

IPC: H01L41/08

CPC classification number: H02N10/00 ,  F03G7/06 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H2061/008 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49204

Abstract: A MEMS hysteretic thermal device may have two passive beam segments driven by a current-carrying loop coupled to the surface of a substrate. The first beam segment is configured to move in a direction having a component perpendicular to the substrate surface, whereas the second beam segment is configured to move in a direction having a component parallel to the substrate surface. By providing this two-dimensional motion, a single MEMS hysteretic thermal device may by used to close a switch having at least one stationary contact affixed to the substrate surface.

Abstract translation: MEMS迟滞热装置可以具有由耦合到衬底的表面的载流环驱动的两个无源束段。 第一光束段被配置为沿着具有垂直于衬底表面的分量的方向移动，而第二光束段被配置成沿具有平行于衬底表面的分量的方向移动。 通过提供这种二维运动，单个MEMS迟滞热装置可以用于封闭具有固定到基板表面的至少一个固定触点的开关。

公开(公告)号：US20080191303A1

公开(公告)日：2008-08-14

申请号：US11705739

申请日：2007-02-14

Applicant: Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Paul J. Rubel

Inventor： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Paul J. Rubel

IPC: H01L31/058 ,  H01L21/00

CPC classification number: H01H1/0036 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

Abstract: A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.

Abstract translation: 公开了一种分离的MEMS热致动器，其对热致动器的悬臂梁中的蠕变基本上不敏感。 在分离的MEMS热致动器中，嵌入的悬臂式驱动梁形成在同一平面上，但与被动梁分开，间隙小。 由于嵌入的悬臂驱动梁和被动梁不直接耦合，镶嵌悬臂驱动梁的静止位置的任何变化可能不会传递到被动梁，如果变化的幅度小于间隙的大小 。

公开(公告)号：US20080061913A1

公开(公告)日：2008-03-13

申请号：US11516489

申请日：2006-09-07

Applicant: Paul J. Rubel

Inventor： Paul J. Rubel

IPC: H01F7/08

CPC classification number: H01H1/0036 ,  B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  H01H2061/006 ,  H01H2061/008

Abstract: An improved MEMS thermal actuator has a cantilevered beam and a conductive circuit having two driving arms, an inner arm adjacent to the cantilevered beam, and an outer arm adjacent to the inner arm. Current flows through the inner and outer arms to heat the conductive circuit, causing it to expand relative to the cantilevered beam. A tether ties the conductive circuit to the cantilevered beam, so that upon expansion, the conductive circuit causes the cantilevered beam to deflect about its anchor point. However, only the inner arm of the driving beam is coupled to the cantilevered beam. Since the outer arm of the conductive circuit is not coupled to the cantilevered beam, the overall stiffness of the actuator may be decreased. In addition, serpentines may be placed in the outer arm of the conductive circuit, in order to further decrease the stiffness of this beam. The actuator may therefore be made more efficient, in that the deflection of the cantilevered beam may be increased for a given input current.

Abstract translation: 改进的MEMS热致动器具有悬臂梁和具有两个驱动臂的导电电路，与悬臂梁相邻的内臂以及与内臂相邻的外臂。 电流流过内臂和外臂以加热导电电路，使其相对于悬臂梁膨胀。 系统将导电电路连接到悬臂梁，使得在膨胀时，导电电路使悬臂梁绕其锚点偏转。 然而，只有驱动梁的内臂联接到悬臂梁。 由于导电电路的外臂未连接到悬臂梁，所以致动器的整体刚度可能会降低。 此外，蛇形管可以放置在导电电路的外臂中，以便进一步降低该梁的刚度。 因此，可以使致动器更有效，因为对于给定的输入电流，可以增加悬臂梁的偏转。

公开(公告)号：US08264307B2

公开(公告)日：2012-09-11

申请号：US12929259

申请日：2011-01-11

Applicant: John S. Foster ,  Alok Paranjypye ,  Paul J. Rubel

Inventor： John S. Foster ,  Alok Paranjypye ,  Paul J. Rubel

IPC: H01H51/22

CPC classification number: H01H59/0009 ,  B81B2201/018 ,  B81B2207/093 ,  B81B2207/095 ,  B81C1/00333 ,  B81C2203/0118 ,  B81C2203/035 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48464 ,  H01L2224/73265 ,  H01L2924/16152 ,  H01L2924/00014 ,  H01L2924/00

Abstract: Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have at least one shunt bar located at a nodal line of a vibrational mode of the deformable plate, so that the shunt bar remains relatively stationary when the plate is vibrating in that vibrational mode. A hermetic seal may be made around the device with a larger, secondary enclosure. Electrical access to the deformable plate may be accomplished by an electrical path which is independent of the seal. The electrical path may include a via through the first substrate or the second substrate, or a flash deposited on an external region of the switch.

Abstract translation: 用于形成静电MEMS板开关的系统和方法包括在第一衬底上形成可变形板，在第二衬底上形成电触点，并使用气密密封来连接两个衬底。 可变形板可以具有位于可变形板的振动模式的节点线处的至少一个分流杆，使得当板在该振动模式下振动时，分流棒保持相对静止。 可以在具有较大二次外壳的装置周围制造气密密封。 可以通过独立于密封件的电气路径来实现对可变形板的电气接入。 电路可以包括通过第一衬底或第二衬底的通孔，或者沉积在开关的外部区域上的闪光。

公开(公告)号：US07675162B2

公开(公告)日：2010-03-09

申请号：US11541774

申请日：2006-10-03

Applicant: John S. Foster ,  Steven H. Hovey ,  Paul J. Rubel ,  Kimon Rybnicek

Inventor： John S. Foster ,  Steven H. Hovey ,  Paul J. Rubel ,  Kimon Rybnicek

IPC: H01L23/10

CPC classification number: B81B7/007 ,  B81B2201/014 ,  B81B2207/092

Abstract: A device and a method are described which hermetically seals at least one microstructure within a cavity. Electrical access to the at least one microstructure is provided by through wafer vias formed through a via substrate which supports the at least one microstructure on its front side. The via substrate and a lid wafer may form a hermetic cavity which encloses the at least one microstructure. The through wafer vias are connected to bond pads located outside the cavity by an interconnect structure formed on the back side of the via substrate. Because they are outside the cavity, the bond pads may be placed inside the perimeter of the bond line forming the cavity, thereby greatly reducing the area occupied by the device. The through wafer vias also shorten the circuit length between the microstructure and the interconnect, thus improving heat transfer and signal loss in the device.

Abstract translation: 描述了一种在空腔内气密地密封至少一个微结构的装置和方法。 通过通过在其前侧支撑至少一个微结构的通孔基板形成的通过晶片通孔提供对至少一个微结构的电接触。 通孔基板和盖子晶片可以形成封闭至少一个微结构的密封腔。 贯通晶片通孔通过形成在通孔基板的背面上的互连结构连接到位于空腔外部的接合焊盘。 因为它们在空腔外部，所以接合焊盘可以放置在形成空腔的接合线的周边内部，从而大大减小了器件所占据的面积。 贯通晶片通孔也缩短了微结构与互连之间的电路长度，从而改善了器件中的传热和信号损失。

公开(公告)号：US07622783B2

公开(公告)日：2009-11-24

申请号：US11705739

申请日：2007-02-14

Applicant: Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Paul J. Rubel

Inventor： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Paul J. Rubel

IPC: H01L29/82

CPC classification number: H01H1/0036 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

Abstract: A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.

Abstract translation: 公开了一种分离的MEMS热致动器，其对热致动器的悬臂梁中的蠕变基本上不敏感。 在分离的MEMS热致动器中，嵌入的悬臂式驱动梁形成在同一平面上，但与被动梁分开，间隙小。 由于嵌入的悬臂驱动梁和被动梁不直接耦合，镶嵌悬臂驱动梁的静止位置的任何变化可能不会传递到被动梁，如果变化的幅度小于间隙的大小 。

公开(公告)号：US07548145B2

公开(公告)日：2009-06-16

申请号：US11334438

申请日：2006-01-19

Applicant: Paul J. Rubel

Inventor： Paul J. Rubel

IPC: H01H51/22

CPC classification number: H02N10/00 ,  F03G7/06 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H2061/008 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49204

Abstract: A MEMS hysteretic thermal device may have a cantilevered beam which bends about one or more points in at least two substantially different directions. In one exemplary embodiment, the MEMS hysteretic thermal device is made from a first segment coupled to an anchor point, and also coupled to a second segment by a joint. Heating two respective drive beams causes the first segment to bend in a direction substantially about the anchor point and the second segment to bend in a direction substantially about the joint. By cooling the first drive beam faster than the second drive beam, the motion of the MEMS thermal device may be hysteretic. The MEMS hysteretic thermal device may be used for example, as an electrical switch or as a valve or piston.

Abstract translation: MEMS迟滞热装置可以具有悬臂梁，其在至少两个基本上不同的方向上围绕一个或多个点弯曲。 在一个示例性实施例中，MEMS滞后热装置由耦合到锚定点的第一段制成，并且还通过接头耦合到第二段。 加热两个相应的驱动梁使得第一段在基本上围绕锚点的方向上弯曲，而第二段在基本上围绕接头的方向上弯曲。 通过比第二驱动光束更快地冷却第一驱动光束，MEMS热装置的运动可能是滞后的。 MEMS迟滞热装置可以例如用作电开关或阀或活塞。