Invention Grant
US07626311B2 Hysteretic MEMS two-dimensional thermal device and method of manufacture 有权
迟滞MEMS二维热装置及其制造方法

  • Patent Title: Hysteretic MEMS two-dimensional thermal device and method of manufacture
  • Patent Title (中): 迟滞MEMS二维热装置及其制造方法
  • Application No.: US11705738
    Application Date: 2007-02-14
  • Publication No.: US07626311B2
    Publication Date: 2009-12-01
  • Inventor: Paul J. Rubel
  • Applicant: Paul J. Rubel
  • Applicant Address: US CA Goleta
  • Assignee: Innovative Micro Technology
  • Current Assignee: Innovative Micro Technology
  • Current Assignee Address: US CA Goleta
  • Agent Jaquelin K. Spong
  • Main IPC: H01L41/08
  • IPC: H01L41/08
Hysteretic MEMS two-dimensional thermal device and method of manufacture
Abstract:
A MEMS hysteretic thermal device may have two passive beam segments driven by a current-carrying loop coupled to the surface of a substrate. The first beam segment is configured to move in a direction having a component perpendicular to the substrate surface, whereas the second beam segment is configured to move in a direction having a component parallel to the substrate surface. By providing this two-dimensional motion, a single MEMS hysteretic thermal device may by used to close a switch having at least one stationary contact affixed to the substrate surface.
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