发明授权
- 专利标题: Hysteretic MEMS two-dimensional thermal device and method of manufacture
- 专利标题(中): 迟滞MEMS二维热装置及其制造方法
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申请号: US11705738申请日: 2007-02-14
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公开(公告)号: US07626311B2公开(公告)日: 2009-12-01
- 发明人: Paul J. Rubel
- 申请人: Paul J. Rubel
- 申请人地址: US CA Goleta
- 专利权人: Innovative Micro Technology
- 当前专利权人: Innovative Micro Technology
- 当前专利权人地址: US CA Goleta
- 代理商 Jaquelin K. Spong
- 主分类号: H01L41/08
- IPC分类号: H01L41/08
摘要:
A MEMS hysteretic thermal device may have two passive beam segments driven by a current-carrying loop coupled to the surface of a substrate. The first beam segment is configured to move in a direction having a component perpendicular to the substrate surface, whereas the second beam segment is configured to move in a direction having a component parallel to the substrate surface. By providing this two-dimensional motion, a single MEMS hysteretic thermal device may by used to close a switch having at least one stationary contact affixed to the substrate surface.
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