Invention Grant
- Patent Title: OPC trimming for performance
- Patent Title (中): OPC修剪性能
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Application No.: US11164044Application Date: 2005-11-08
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Publication No.: US07627836B2Publication Date: 2009-12-01
- Inventor: James A. Culp , Lars W. Liebmann , Rajeev Malik , K. Paul Muller , Shreesh Narasimha , Stephen L. Runyon , Patrick M. Williams
- Applicant: James A. Culp , Lars W. Liebmann , Rajeev Malik , K. Paul Muller , Shreesh Narasimha , Stephen L. Runyon , Patrick M. Williams
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: DeLio & Peterson, LLC
- Agent Robert Curcio; Wenjie Li
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
An iterative timing analysis is analytically performed before a chip is fabricated, based on a methodology using optical proximity correction techniques for shortening the gate lengths and adjusting metal line widths and proximity distances of critical time sensitive devices. The additional mask is used as a selective trim to form shortened gate lengths or wider metal lines for the selected, predetermined transistors, affecting the threshold voltages and the RC time constants of the selected devices. Marker shapes identify a predetermined subgroup of circuitry that constitutes the devices in the critical timing path. The analysis methodology is repeated as often as needed to improve the timing of the circuit with shortened designed gate lengths and modified RC timing constants until manufacturing limits are reached. A mask is made for the selected critical devices using OPC techniques.
Public/Granted literature
- US20070106968A1 OPC TRIMMING FOR PERFORMANCE Public/Granted day:2007-05-10
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