发明授权
- 专利标题: Process for producing silicon single crystal
- 专利标题(中): 硅单晶生产工艺
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申请号: US11486508申请日: 2006-07-14
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公开(公告)号: US07628854B2公开(公告)日: 2009-12-08
- 发明人: Toshiaki Ono , Wataru Sugimura , Takayuki Kubo , Akira Higuchi , Ken Nakajima
- 申请人: Toshiaki Ono , Wataru Sugimura , Takayuki Kubo , Akira Higuchi , Ken Nakajima
- 申请人地址: JP Tokyo
- 专利权人: Sumco Corporation
- 当前专利权人: Sumco Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Kolisch Hartwell, P.C.
- 优先权: JPP2005-208526 20050719
- 主分类号: C30B15/20
- IPC分类号: C30B15/20
摘要:
A process for producing a silicon single crystal includes the steps of bringing a seed crystal into contact with a silicon melt, gradually pulling the seed crystal from the melt so as to form a neck having a tapered portion and a constant diameter portion, then pulling a silicon single crystal. The atmosphere used during neck formation is a hydrogen-containing atmosphere prepared by adding a hydrogen-containing substance to an inert gas. The hydrogen-containing substance has a hydrogen gas equivalent concentration in the hydrogen-containing atmosphere of 3 to 20%.
公开/授权文献
- US20070017434A1 Process for producing silicon single crystal 公开/授权日:2007-01-25
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