发明授权
- 专利标题: Inspecting apparatus for glass substrate
- 专利标题(中): 玻璃基板检查装置
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申请号: US12003629申请日: 2007-12-28
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公开(公告)号: US07630071B2公开(公告)日: 2009-12-08
- 发明人: Jungho Park , Sooyoun Kim
- 申请人: Jungho Park , Sooyoun Kim
- 申请人地址: KR Seoul
- 专利权人: LG Display Co., Ltd.
- 当前专利权人: LG Display Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: Holland & Knight LLP
- 优先权: KR10-2007-0030285 20070328
- 主分类号: G01N21/00
- IPC分类号: G01N21/00
摘要:
An inspecting apparatus for a glass substrate detects blurs of a green color filter layer, a blue color filter layer, a column spacer layer, a pixel layer of a thin film transistor, or the like, which are generally hardly inspected. The inspecting apparatus for a glass substrate includes: a first illumination unit supplying reflective light to a surface of the substrate to inspect whether the surface of the substrate is defective or not; a second illumination unit supplying transmissive light from a rear side of the substrate to inspect whether the interior of the substrate is defective or not; a latticed rear plate provided on a rear surface of the substrate; and a driving interferometer system generating a phase difference of light by driving such that a driving guide is moved along the rear plate or the rear plate itself is moved.
公开/授权文献
- US20080239302A1 Inspecting apparatus for glass substrate 公开/授权日:2008-10-02
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