公开(公告)号：US07630071B2

公开(公告)日：2009-12-08

申请号：US12003629

申请日：2007-12-28

申请人： Jungho Park ,  Sooyoun Kim

发明人： Jungho Park ,  Sooyoun Kim

IPC分类号： G01N21/00

CPC分类号： G01N21/958 ,  G01N21/45 ,  G02F1/1309

摘要： An inspecting apparatus for a glass substrate detects blurs of a green color filter layer, a blue color filter layer, a column spacer layer, a pixel layer of a thin film transistor, or the like, which are generally hardly inspected. The inspecting apparatus for a glass substrate includes: a first illumination unit supplying reflective light to a surface of the substrate to inspect whether the surface of the substrate is defective or not; a second illumination unit supplying transmissive light from a rear side of the substrate to inspect whether the interior of the substrate is defective or not; a latticed rear plate provided on a rear surface of the substrate; and a driving interferometer system generating a phase difference of light by driving such that a driving guide is moved along the rear plate or the rear plate itself is moved.

摘要翻译： 用于玻璃基板的检查装置检测通常几乎不被检查的绿色滤色器层，蓝色滤色器层，列间隔层，薄膜晶体管的像素层等的模糊。 玻璃基板的检查装置包括：第一照明单元，向基板的表面提供反射光，以检查基板的表面是否有缺陷; 第二照明单元，从所述基板的后侧提供透射光，以检查所述基板的内部是否有缺陷; 设置在所述基板的后表面上的网状后板; 以及通过驱动使驱动引导件沿着后板或后板本身移动而产生光的相位差的驱动干涉仪系统。

公开(公告)号：US20080239302A1

公开(公告)日：2008-10-02

申请号：US12003629

申请日：2007-12-28

申请人： Jungho Park ,  Sooyoun Kim

发明人： Jungho Park ,  Sooyoun Kim

IPC分类号： G01N21/00

CPC分类号： G01N21/958 ,  G01N21/45 ,  G02F1/1309

摘要： An inspecting apparatus for a glass substrate detects blurs of a green color filter layer, a blue color filter layer, a column spacer layer, a pixel layer of a thin film transistor, or the like, which are generally hardly inspected. The inspecting apparatus for a glass substrate includes: a first illumination unit supplying reflective light to a surface of the substrate to inspect whether the surface of the substrate is defective or not; a second illumination unit supplying transmissive light from a rear side of the substrate to inspect whether the interior of the substrate is defective or not; a latticed rear plate provided on a rear surface of the substrate; and a driving interferometer system generating a phase difference of light by driving such that a driving guide is moved along the rear plate or the rear plate itself is moved.

摘要翻译： 用于玻璃基板的检查装置检测通常几乎不被检查的绿色滤色器层，蓝色滤色器层，列间隔层，薄膜晶体管的像素层等的模糊。 玻璃基板的检查装置包括：第一照明单元，向基板的表面提供反射光，以检查基板的表面是否有缺陷; 第二照明单元，从所述基板的后侧提供透射光，以检查所述基板的内部是否有缺陷; 设置在所述基板的后表面上的网状后板; 以及通过驱动使驱动引导件沿着后板或后板本身移动而产生光的相位差的驱动干涉仪系统。