发明授权
- 专利标题: Prediction of uniformity of a wafer
- 专利标题(中): 预测晶圆的均匀性
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申请号: US11744107申请日: 2007-05-03
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公开(公告)号: US07634325B2公开(公告)日: 2009-12-15
- 发明人: Jean Wang , Francis Ko , Ping-Hsu Chen , Henry Lo , Chih-Wei Lai
- 申请人: Jean Wang , Francis Ko , Ping-Hsu Chen , Henry Lo , Chih-Wei Lai
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Haynes and Boone, LLP
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
A method of monitoring uniformity of a wafer is provided. A wafer parameter is selected. Manufacturing data is collected. The manufacturing data includes measurements of the selected wafer parameter. An average offset profile of the wafer parameter for a first and second wafer is determined using the manufacturing data. The first and second wafer are associated with a product type and were processed by a processing tool. An offset profile for a third wafer is predicted for a wafer using the average offset profile. The third wafer is associated with the product type and was processed by the processing tool.
公开/授权文献
- US20080275588A1 PREDICTION OF UNIFORMITY OF A WAFER 公开/授权日:2008-11-06