Invention Grant
- Patent Title: Thermal shunt for active devices on silicon-on-insulator wafers
- Patent Title (中): 绝缘体上硅片上有源器件的热分流
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Application No.: US11968000Application Date: 2007-12-31
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Publication No.: US07639719B2Publication Date: 2009-12-29
- Inventor: Alexander Fang , Richard Jones , Hyundai Park , Matthew Sysak
- Applicant: Alexander Fang , Richard Jones , Hyundai Park , Matthew Sysak
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agent Kevin A. Reif
- Main IPC: H01S3/00
- IPC: H01S3/00 ; H01S3/04 ; H01L21/00 ; H01L23/34

Abstract:
An optimized structure for heat dissipation is provided that may include two types of thermal shunts. The first type of thermal shunt employed involves using p and n metal contact layers to conduct heat away from the active region and into the silicon substrate. The second type of thermal shunt involves etching and backfilling a portion of the silicon wafer with poly-silicon to conduct heat to the silicon substrate.
Public/Granted literature
- US20090168821A1 THERMAL SHUNT FOR ACTIVE DEVICES ON SILICON-ON-INSULATOR WAFERS Public/Granted day:2009-07-02
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