发明授权
- 专利标题: Split-gate memory cells and fabrication methods thereof
- 专利标题(中): 分离栅存储单元及其制造方法
-
申请号: US11592290申请日: 2006-11-03
-
公开(公告)号: US07652318B2公开(公告)日: 2010-01-26
- 发明人: Chang-Jen Hsieh , Hung-Cheng Sung , Wen-Ting Chu , Chen-Ming Huang , Ya-Chen Kao , Shih-Chang Liu , Chi-Hsin Lo , Chung-Yi Yu , Chia-Shiung Tsai
- 申请人: Chang-Jen Hsieh , Hung-Cheng Sung , Wen-Ting Chu , Chen-Ming Huang , Ya-Chen Kao , Shih-Chang Liu , Chi-Hsin Lo , Chung-Yi Yu , Chia-Shiung Tsai
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
Split-gate memory cells and fabrication methods thereof. A split-gate memory cell comprises a plurality of isolation regions formed on a semiconductor substrate along a first direction, between two adjacent isolation regions defining an active region having a pair of drains and a source region. A pair of floating gates are disposed on the active regions and self-aligned with the isolation regions, wherein a top level of the floating gate is equal to a top level of the isolation regions. A pair of control gates are self-aligned with the floating gates and disposed on the floating gates along a second direction. A source line is disposed between the pair of control gates along the second direction. A pair of select gates are disposed on the outer sidewalls of the pair of control gates along the second direction.
公开/授权文献
- US20080121975A1 Split-gate memory cells and fabrication methods thereof 公开/授权日:2008-05-29
信息查询
IPC分类: