发明授权
US07657995B2 Method of fabricating a microelectromechanical system (MEMS) switch
失效
制造微机电系统(MEMS)开关的方法
- 专利标题: Method of fabricating a microelectromechanical system (MEMS) switch
- 专利标题(中): 制造微机电系统(MEMS)开关的方法
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申请号: US11776835申请日: 2007-07-12
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公开(公告)号: US07657995B2公开(公告)日: 2010-02-09
- 发明人: Louis Hsu , Timothy Dalton , Lawrence Clevenger , Carl Radens , Kwong Hon Wong , Chih-Chao Yang
- 申请人: Louis Hsu , Timothy Dalton , Lawrence Clevenger , Carl Radens , Kwong Hon Wong , Chih-Chao Yang
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 H. Daniel Schnurmann
- 主分类号: H01H11/00
- IPC分类号: H01H11/00 ; H01H65/00
摘要:
A method of fabricating a MEMS switch that is fully integratable in a semiconductor fabrication line. The method consists of forming two posts, each end thereof terminating in a cap; a rigid movable conductive plate having a surface terminating in a ring in each of two opposing edges, the rings being loosely connected to guiding posts; forming upper and lower electrode pairs and upper and lower interconnect wiring lines connected and disconnected by the rigid movable conductive plate. The conductive plate moves up, shorting two upper interconnect wirings lines. Conversely, the conductive plate moves down when the voltage is applied to the lower electrode pair, while the upper electrode pair is grounded, shorting the two lower interconnect wiring lines and opening the upper wiring lines.