发明授权
US07666569B2 Positive resist composition and method for forming resist pattern
有权
正型抗蚀剂组合物和形成抗蚀剂图案的方法
- 专利标题: Positive resist composition and method for forming resist pattern
- 专利标题(中): 正型抗蚀剂组合物和形成抗蚀剂图案的方法
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申请号: US10540056申请日: 2003-12-18
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公开(公告)号: US07666569B2公开(公告)日: 2010-02-23
- 发明人: Kazufumi Sato , Mitsuo Hagihara , Daisuke Kawana
- 申请人: Kazufumi Sato , Mitsuo Hagihara , Daisuke Kawana
- 申请人地址: JP Kawasaki-shi
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Knobbe, Martens, Olson & Bear, LLP
- 优先权: JP2002-376294 20021226
- 国际申请: PCT/JP03/16266 WO 20031218
- 国际公布: WO2004/059392 WO 20040715
- 主分类号: G03F7/004
- IPC分类号: G03F7/004
摘要:
A positive resist composition including a resin component (A) containing an acid dissociable dissolution inhibiting group whose alkali solubility increases under action of acid and an acid generator component (B) that generates acid on exposure, wherein the resin component (A) is a copolymer comprising a first structural unit (a1) derived from a hydroxystyrene and a second structural unit (a2) derived from a (meth)acrylate ester containing an alcoholic hydroxyl group, in which 10 mol % or more and 25 mol % or less of a combined total of hydroxyl groups within the structural units (a1) and alcoholic hydroxyl groups within the structural units (a2) are protected with the acid dissociable dissolution inhibiting groups, and a weight average molecular weight of the copolymer prior to protection with the acid dissociable dissolution inhibiting groups is 2,000 or more and 8,500 or less.
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