发明授权
- 专利标题: Light-collecting device, solid-state imaging apparatus and method of manufacturing thereof
- 专利标题(中): 光收集装置,固态成像装置及其制造方法
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申请号: US11658666申请日: 2005-09-01
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公开(公告)号: US07667286B2公开(公告)日: 2010-02-23
- 发明人: Kimiaki Toshikiyo , Kazutoshi Onozawa , Daisuke Ueda , Taku Goubara
- 申请人: Kimiaki Toshikiyo , Kazutoshi Onozawa , Daisuke Ueda , Taku Goubara
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Wenderoth, Lind & Ponack, L.L.P.
- 优先权: JP2004-254733 20040901
- 国际申请: PCT/JP2005/016024 WO 20050901
- 国际公布: WO2006/025496 WO 20060309
- 主分类号: H01L31/0232
- IPC分类号: H01L31/0232
摘要:
A high sensitive solid-state imaging apparatus which corresponds to an optical system has a short focal length (an optical system having a large incident angle θ). Each pixel (2.8 mm square in size) includes a distributed refractive index lens, a color filter for green, Al wirings, a signal transmitting unit, a planarized layer, a light-receiving element (Si photodiode), and an Si substrate. The concentric circle structure of the distributed index lens is made of four types of materials having different refractive indexes such as TiO2 (n=2.53), SiN (n=2.53), SiO2 (n=2.53), and air (n=1.0). In the concentric structure, a radial difference of outer peripheries of adjacent circular light-transmitting films is 100 nm. Furthermore, the film thickness is 0.4 νm.
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