发明授权
US07670912B2 Methods of fabricating multichannel metal oxide semiconductor (MOS) transistors
有权
制造多通道金属氧化物半导体(MOS)晶体管的方法
- 专利标题: Methods of fabricating multichannel metal oxide semiconductor (MOS) transistors
- 专利标题(中): 制造多通道金属氧化物半导体(MOS)晶体管的方法
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申请号: US10797463申请日: 2004-03-10
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公开(公告)号: US07670912B2公开(公告)日: 2010-03-02
- 发明人: Kyoung-Hwan Yeo , Dong-Gun Park , Jeong-Dong Choe
- 申请人: Kyoung-Hwan Yeo , Dong-Gun Park , Jeong-Dong Choe
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec
- 优先权: KR10-2003-0030883 20030515
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
Unit cells of metal oxide semiconductor (MOS) transistors are provided including an integrated circuit substrate an a MOS transistor on the integrated circuit substrate. The MOS transistor includes a source region, a drain region and a gate. The gate is positioned between the source region and the drain region. A horizontal channel is provided between the source and drain regions. The horizontal channel includes at least two spaced apart horizontal channel regions. Related methods of fabricating MOS transistors are also provided.
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