发明授权
- 专利标题： Electrostatic chuck having textured contact surface
- 专利标题（中）： 具有纹理接触表面的静电吸盘
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申请号： US11214286申请日： 2005-08-29
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公开(公告)号： US07672110B2公开(公告)日： 2010-03-02
- 发明人: Jennifer Y. Sun , James Dempster , Semyon L. Kats , Allen Fox
- 申请人： Jennifer Y. Sun , James Dempster , Semyon L. Kats , Allen Fox
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Janah & Associates, P.C.
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; H01T23/00 ; B23B31/28
摘要：
An electrostatic chuck has an electrode embedded in a dielectric which is mounted on a pedestal. The dielectric has a contact surface with an average surface roughness of less than about 0.5 μm, a surface peak waviness of less than about 0.12 μm, and a surface peak waviness material ratio of greater than about 20%. The surface texture can be formed by lapping the dielectric surface with a slurry of abrasive particles.
公开/授权文献
- US20070047170A1 Electrostatic chuck having textured contact surface 公开/授权日：2007-03-01