公开(公告)号：US20240051075A1

公开(公告)日：2024-02-15

申请号：US18383430

申请日：2023-10-24

Applicant: Applied Materials, Inc.

Inventor： Arvinder CHADHA ,  Tomoaki KOHZU

IPC: B23Q3/15 ,  H01L21/683 ,  B23B31/28

CPC classification number: B23Q3/15 ,  H01L21/6833 ,  B23B31/28

Abstract: Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceramic-to-ceramic body. In one example, ceramic porous plug is sintered with the ceramic body.

公开(公告)号：US20200078872A1

公开(公告)日：2020-03-12

申请号：US16566198

申请日：2019-09-10

Applicant: SMW-Autoblok Spannsysteme GmbH

Inventor： Eckhard Maurer

IPC: B23B31/28 ,  B23B31/16

Abstract: In a coupling device (1), in particular for a man-machine interface (21) for operating inductively operated chucks (2), the coupling device comprising: an inductively operated chuck (2) for centering a workpiece (3) to be machined in space with at least one movable clamping jaw (4), an electric motor (6) drivingly connected to each of the said jaws (4), the said electric motor (6) being incorporated in the said chuck (2) and each jaw (4) being driven or fixed by the said electric motor (6), a first inductive transmission device (7) assigned to the chuck (2), a carrier or machine frame (10) spatially separated from the chuck (2), a second inductive transmission device (8) assigned to the frame (10), which is arranged in the region of the first inductive transmission device (7) of the chuck and exchanges measuring signals and voltages inductively therewith, and an external control device (11), by means of which command and monitoring data required for the operation and setting of the clamping jaws (4) and for the operation and locking of the electric motors (6) can be entered and/or read, the intention is to ensure that, independently of the customer-specific electrical devices, complete operation of the chuck (2) and its monitoring during a machining operation is achieved immediately after coupling of the control devices (11) provided by the customer with the chuck. This is achieved in that at least one programmable interface (21), which is electrically connected to the second inductive transmission device (8) and the control device (11), is provided between the second inductive transmission device (8) and the control device (11), each interface (21) has one or more command and control programs by means of which the chuck (2) can be set or selected by the control device (11), a plurality of measuring sensors (22) are provided which are assigned to the clamping jaws (4), electric motors (6) and/or the chuck (2) and by means of which their operating states are detected and transmitted to the respective interface (21), in that the respective interface (21) compares the actual data stored in the command programs with the measurement data determined by the measuring sensors (22), and in that this comparison of the selected operating state of the chuck (2) with an actual operating state generates data records which are evaluated by the respective interface (21) and forwarded to the control device (11) of the chuck (2), the clamping jaws (4) or the electric motors (6).

公开(公告)号：US10207332B2

公开(公告)日：2019-02-19

申请号：US15659739

申请日：2017-07-26

Applicant: JTEKT CORPORATION

Inventor： Takashi Yokoyama ,  Masami Narisawa ,  Shogo Kuroyanagi ,  Yoshinobu Shichiri

IPC: B23B31/28 ,  B23B31/10 ,  B23Q3/152 ,  B23B31/22 ,  B24B5/28

Abstract: A work holder includes: a first holding part having three attracting members that are arranged circumferentially apart from each other to attract an axial end face of an annular work; and a second holding part having a contacting member that is held in contact with an inner periphery or outer periphery of the work and restricts radial movement of the work.

公开(公告)号：US20180243839A1

公开(公告)日：2018-08-30

申请号：US15756015

申请日：2015-09-02

Applicant: WIELANDTS UPMT ,  WSL

Inventor： Marc Wielandts

IPC: B23B31/36 ,  B23B31/30 ,  B23B31/28 ,  B24B41/06

CPC classification number: B23B31/36 ,  B23B31/28 ,  B23B31/307 ,  B23B2250/04 ,  B24B19/02 ,  B24B41/061 ,  B24B41/068 ,  Y10T29/49998 ,  Y10T279/11 ,  Y10T279/14 ,  Y10T279/23

Abstract: A chuck for a machine tool having a rotation spindle with a main axis of rotation. The chuck comprises a base plate, a first rotatable plate eccentrically mounted on the base plate, a second rotatable plate eccentrically mounted on the first rotatable plate, balancing means for aligning a principal axis of inertia of the chuck with the main axis of rotation and a holding mechanism. The chuck is provided with an actuating mechanism for angularly displacing the first rotatable plate around a first rotation axis over a first angle of rotation and/or the second rotatable plate around a second rotation axis over a second angle of rotation such that the position of the object with respect to the main axis of rotation can be altered.

公开(公告)号：US09937563B2

公开(公告)日：2018-04-10

申请号：US15021351

申请日：2014-09-10

Applicant: IML—Instrumenta Mechanik Labor GmbH

Inventor： Sebastian Hunger ,  Fabian Hunger ,  Erich Hunger

IPC: B23B31/22 ,  B23B31/28 ,  B23B31/00

CPC classification number: B23B31/223 ,  B23B31/005 ,  B23B31/1071 ,  B23B31/1072 ,  B23B31/22 ,  B23B31/28 ,  Y10T279/17717 ,  Y10T279/17726 ,  Y10T279/17803 ,  Y10T279/23 ,  Y10T279/26

Abstract: The invention relates to a drill chuck which has a drilling needle receptacle device for removable receiving of a drilling needle (1), a hollow cylindrical magnetic holder for the drilling needle receptacle device and a coupling device for torque transfer from a drive device to the drilling needle receptacle device. The drilling needle receptacle device, in which a drilling needle (1) having a flattened end section (1′) can be received, has a receptacle element (7), at least two clamping bodies (10) and a clamping insert (6). The receptacle element (7) has at least one cylindrical section (72) having a recess (71) and the clamping insert (6) has counter-molded bodies (61) which supplement the clamping bodies (10) and which extend away from a stop disc (62). The stop disc (62) contacts a face of the cylindrical section (72) and has a lead-through opening (63) for the drilling needle (1). The counter-molded body (61) and the clamping bodies (10) are designed in respect of the dimensions and shape thereof for arrangement in the recess (71) and for clamping receiving of the flattened end section (1′) of the drilling needle (1) between the clamping bodies (10) and the counter-molded bodies (61). The invention further relates to a drilling needle and to a drilling needle-drill chuck assembly.

公开(公告)号：US09849551B2

公开(公告)日：2017-12-26

申请号：US14718396

申请日：2015-05-21

Applicant: FANUC CORPORATION

Inventor： Kenzo Ebihara ,  Takeshi Ooki

IPC: B23Q3/18 ,  B23B31/28 ,  B23Q3/12 ,  B23B31/02 ,  B23B51/12

CPC classification number: B23Q3/186 ,  B23B31/02 ,  B23B31/28 ,  B23B51/12 ,  B23B2260/10 ,  B23Q3/12 ,  Y10T279/23

Abstract: A tool gripping mechanism includes a tool holder and a shaft to which the tool holder is attached. The shaft is fixed to a rotary shaft of a spindle device. A plurality of magnets are disposed in pairs on concentric circles on surfaces of the tool holder and the shaft which face each other. When the tool holder is in a specific phase with respect to the shaft, the magnets of the tool holder and the magnets of the shaft attract each other, and the tool holder is aligned with respect to the shaft in that phase.

公开(公告)号：US09744600B2

公开(公告)日：2017-08-29

申请号：US14711951

申请日：2015-05-14

Applicant: FU DING ELECTRONICAL TECHNOLOGY (JIASHAN) CO., LTD. ,  HON HAI PRECISION INDUSTRY CO., LTD.

Inventor： Ming-Lu Yang ,  Yang-Mao Peng ,  Jian-Shi Jia ,  Jing-Shuang Sui ,  Zhen-Guang Xu ,  Jie Li

IPC: B23B31/02 ,  B23B31/28 ,  H02K35/04 ,  B23Q16/00

CPC classification number: B23B31/028 ,  B23B31/28 ,  B23B2260/10 ,  B23B2270/022 ,  B23B2270/10 ,  B23B2270/38 ,  B23Q16/003 ,  H02K35/04 ,  Y10T279/17991 ,  Y10T279/23 ,  Y10T279/3487 ,  Y10T408/23

Abstract: An electrically-adjustable tool holder precisely movable in a straight line within a magnetic field under electrical stimulation includes a handle body, a connecting member, and a driving member. The connecting member has a first end securely coupled to an end of the handle body, a second end opposite to the first end, and defines a through hole passing through the first end and the second end. The driving member includes a magnet securely received in the through hole, and an electrical electric coil movably received in the magnet. The electric coil is configured to be securely coupled to the tool, and moves the tool up or down along the central axis of the handle body.

公开(公告)号：US09472444B2

公开(公告)日：2016-10-18

申请号：US13593479

申请日：2012-08-23

Applicant: Tien-Chih Cheng ,  Ying Zhang ,  Shu-Huei Suen ,  Chen-Chiao Kao

Inventor： Tien-Chih Cheng ,  Ying Zhang ,  Shu-Huei Suen ,  Chen-Chiao Kao

IPC: B05C13/00 ,  B23B31/28 ,  B05D1/02 ,  B05C11/00 ,  B05D3/12 ,  H01L21/687

CPC classification number: H01L21/6875 ,  B05B13/02 ,  B05B15/00 ,  B24B7/228 ,  H01L21/6833 ,  H01L21/68757 ,  Y10T279/23

Abstract: A wafer support device is provided. The wafer support device includes a plurality of support portions; and a bottom area located among the support portions, wherein the bottom area has a protective layer formed thereon. A method for processing a working surface of a wafer support device is also provided.

Abstract translation: 提供了晶片支撑装置。 晶片支撑装置包括多个支撑部分; 以及位于支撑部之间的底部区域，其中底部区域具有形成在其上的保护层。 还提供了一种用于处理晶片支撑装置的工作表面的方法。

公开(公告)号：US09457441B2

公开(公告)日：2016-10-04

申请号：US14384648

申请日：2013-06-25

Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.

Inventor： Huping Jia

IPC: B23B31/28 ,  B23Q3/15 ,  B23Q3/154 ,  C03B33/027

Abstract: A cutter holding device is provided for a cutting machine and includes: a mounting base and a holding member mounted in the mounting base. The mounting base includes a mounting section, iron cores mounted in the mounting section, and a winding wound around an outer circumference of the mounting section. The mounting section includes a mounting trough formed therein. The holding member is mounted in the mounting trough, wherein the iron cores and the winding collectively form first electromagnets, which upon application of electricity thereto, attract and fix the holding member in the mounting trough of the mounting base. The cutter holding device uses magnetic forces applied between the mounting base and the holding member for attraction and fixing so as to easily control fixing and removal of the holding member.

Abstract translation: 为切割机提供刀具保持装置，包括：安装基座和安装在安装基座中的保持构件。 安装基座包括安装部分，安装在安装部分中的铁芯和围绕安装部分的外周缠绕的绕组。 安装部分包括形成在其中的安装槽。 保持构件安装在安装槽中，其中铁芯和绕组共同形成第一电磁体，其在施加电力时吸引并将固定构件固定在安装基座的安装槽中。 刀具保持装置使用施加在安装基座和保持构件之间的磁力进行吸引和固定，以便容易地控制保持构件的固定和移除。

公开(公告)号：US09248509B2

公开(公告)日：2016-02-02

申请号：US14447557

申请日：2014-07-30

Applicant: Hamid Tavassoli ,  Surajit Kumar ,  Kallol Bera ,  Xiaoping Zhou ,  Shane C. Nevil ,  Douglas A. Buchberger, Jr.

Inventor： Hamid Tavassoli ,  Surajit Kumar ,  Kallol Bera ,  Xiaoping Zhou ,  Shane C. Nevil ,  Douglas A. Buchberger, Jr.

IPC: B23K10/00 ,  B23B31/28 ,  H01L21/67 ,  H01L21/683 ,  H05H1/46 ,  B23Q3/15

CPC classification number: B23B31/28 ,  B23B2231/24 ,  B23Q3/15 ,  H01L21/67069 ,  H01L21/6833 ,  H05H1/46 ,  Y10T279/23

Abstract: An electrostatic chuck assembly including a dielectric layer with a top surface to support a workpiece. A cooling channel base disposed below the dielectric layer includes a plurality of inner fluid conduits disposed beneath an inner portion of the top surface, and a plurality of outer fluid conduits disposed beneath an outer portion of the top surface. A chuck assembly includes a thermal break disposed within the cooling channel base between the inner and outer fluid conduits. A chuck assembly includes a fluid distribution plate disposed below the cooling channel base and the base plate to distribute a heat transfer fluid delivered from a common input to each inner or outer fluid conduit. The branches of the inner input manifold may have substantially equal fluid conductance.

Abstract translation: 一种静电卡盘组件，包括具有顶表面以支撑工件的电介质层。 布置在电介质层下方的冷却通道底座包括设置在顶表面的内部下方的多个内部流体导管，以及设置在顶部表面外部的多个外部流体导管。 卡盘组件包括设置在内部和外部流体管道之间的冷却通道底部内的热断裂。 卡盘组件包括布置在冷却通道底部和底板下方的流体分配板，用于将从公共输入端输送的传热流体分配到每个内部或外部流体导管。 内部输入歧管的分支可以具有基本相等的流体电导。