Invention Grant
- Patent Title: System for transporting substrate carriers
- Patent Title (中): 用于运输衬底载体的系统
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Application No.: US11838306Application Date: 2007-08-14
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Publication No.: US07673735B2Publication Date: 2010-03-09
- Inventor: Michael Robert Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
- Applicant: Michael Robert Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan
- Main IPC: B65G29/00
- IPC: B65G29/00

Abstract:
In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.
Public/Granted literature
- US20080289932A1 SYSTEM FOR TRANSPORTING SUBSTRATE CARRIERS Public/Granted day:2008-11-27
Information query
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