公开(公告)号：US07673735B2

公开(公告)日：2010-03-09

申请号：US11838306

申请日：2007-08-14

申请人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G29/00

CPC分类号： H01L21/67769 ,  H01L21/67724 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736

摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.

摘要翻译： 在半导体制造设备中，输送机输送基板载体。 基板载体从输送机卸载并装载到输送机上而不停止输送机。 在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。 类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。 没有载体的单个基底可以类似地从输送机装载和/或卸载。

公开(公告)号：US07527141B2

公开(公告)日：2009-05-05

申请号：US11554876

申请日：2006-10-31

申请人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G29/00

CPC分类号： H01L21/67276 ,  H01L21/67769 ,  H01L21/67778

摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.

公开(公告)号：US07506746B2

公开(公告)日：2009-03-24

申请号：US11761363

申请日：2007-06-11

申请人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G29/00

CPC分类号： H01L21/67769 ,  H01L21/67724 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736

摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.

摘要翻译： 在半导体制造设备中，输送机输送基板载体。 基板载体从输送机卸载并装载到输送机上而不停止输送机。 在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。 类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。 没有载体的单个基底可以类似地从输送机装载和/或卸载。

公开(公告)号：US20080289932A1

公开(公告)日：2008-11-27

申请号：US11838306

申请日：2007-08-14

申请人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G49/07

CPC分类号： H01L21/67769 ,  H01L21/67724 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736

摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.

摘要翻译： 在半导体制造设备中，输送机输送基板载体。 基板载体从输送机卸载并装载到输送机上而不停止输送机。 在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。 类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。 没有载体的单个基底可以类似地从输送机装载和/或卸载。

公开(公告)号：US07234584B2

公开(公告)日：2007-06-26

申请号：US10650310

申请日：2003-08-28

申请人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G29/00

CPC分类号： H01L21/67276 ,  H01L21/67769 ,  H01L21/67778

摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.

摘要翻译： 在半导体制造设备中，输送机输送基板载体。 基板载体从输送机卸载并装载到输送机上而不停止输送机。 在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。 类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。 没有载体的单个基底可以类似地从输送机装载和/或卸载。

公开(公告)号：US07857570B2

公开(公告)日：2010-12-28

申请号：US12100388

申请日：2008-04-09

申请人： Martin R. Elliott ,  Michael R. Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Martin R. Elliott ,  Michael R. Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G49/07

CPC分类号： H01L21/67775 ,  Y10S414/14

摘要： In one aspect, a substrate loading station for a processing tool includes plural load ports. Each load port is operatively coupled to the processing tool and has a mechanism for opening a substrate carrier. A carrier handler transports substrate carriers from a factory exchange location to the load ports without placing the carriers on any carrier support location other than the load ports. Numerous other aspects are provided.

摘要翻译： 一方面，用于处理工具的基板装载站包括多个装载端口。 每个负载端口可操作地耦合到处理工具并且具有用于打开衬底载体的机构。 载体处理器将基板载体从工厂交换位置传送到负载端口，而不将载体放置在除负载端口之外的任何载体支撑位置上。 提供了许多其他方面。

公开(公告)号：US07594789B2

公开(公告)日：2009-09-29

申请号：US11838501

申请日：2007-08-14

申请人： Michael R. Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael R. Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G17/02

CPC分类号： H01L21/6773 ,  H01L21/67733 ,  H01L21/67769 ,  H01L21/67778

摘要： In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support. The overhead transfer flange has a first side and a second side opposite the first side that is wider than the first side. Numerous other aspects are provided.

摘要翻译： 在第一方面，提供了一种用于支撑衬底载体的第一装置。 第一装置包括适于联接到衬底载体主体和架空托架支架的架空输送凸缘。 架空输送法兰具有比第一侧宽的第一侧和与第一侧相对的第二侧。 提供了许多其他方面。

公开(公告)号：US07552816B2

公开(公告)日：2009-06-30

申请号：US11619183

申请日：2007-01-02

申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

IPC分类号： B65G43/08

CPC分类号： H01L21/68707 ,  H01L21/6773 ,  H01L21/67733

摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

公开(公告)号：US07540371B2

公开(公告)日：2009-06-02

申请号：US11619181

申请日：2007-01-02

申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

IPC分类号： B65G47/34

CPC分类号： H01L21/68707 ,  H01L21/6773 ,  H01L21/67733

摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

公开(公告)号：US07537108B2

公开(公告)日：2009-05-26

申请号：US11838354

申请日：2007-08-14

申请人： Michael R. Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael R. Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G17/02

CPC分类号： H01L21/67706 ,  B65G17/20 ,  B65G37/02 ,  B65G2201/0297 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67769 ,  H01L21/67778 ,  Y10S414/135

摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.